A low-power interface circuit for multi-sensor applications

Po Chang Wu; Bin Da Liu; Chih Yuan Yeh; Sih Yu Chen; Hann Huei Tsai; Ying Zong Juang

doi:10.1109/ISISS.2015.7102367

A low-power interface circuit for multi-sensor applications

Po Chang Wu
, Bin Da Liu
, Chih Yuan Yeh
, Sih Yu Chen
, Hann Huei Tsai
, Ying Zong Juang

電機工程學系

研究成果: Conference contribution

1 引文斯高帕斯（Scopus）

摘要

This paper presents a low-power generic readout circuit for capacitive and resistive complementary metaloxide-semiconductor (CMOS) micro-electro-mechanical-system (MEMS) sensors. This readout architecture can be scaled to even more sensors to achieve chip area and power consumption efficient. An incremental sigma-delta analog-to-digital converter (ΣΔ ADC) is used for providing multiplexed digital output. A demonstration chip was implemented in a 0.18-μm CMOS MEMS process, which integrates a three-axis accelerometer, the readout circuit, and an ARM M0 microprocessor. The chip area is 3.5×2.5 mm² and the interface circuit with ADC draw only 120 mA of current from a 1.8-V supply. A magneto-resistance-type three-axis magnetic sensor is manufactured via extra post processes. This chip is designed to demonstrate a monolithic virtual gyroscope, which is a popular solution for low-power and low-cost inertial applications.

原文	English
主出版物標題	2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings
發行者	Institute of Electrical and Electronics Engineers Inc.
ISBN（電子）	9781479959143
DOIs	https://doi.org/10.1109/ISISS.2015.7102367
出版狀態	Published - 2015 5月 5
事件	2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Hapuna Beach, United States 持續時間: 2015 3月 23 → 2015 3月 26

出版系列

名字	2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings

Other

Other	2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015
國家/地區	United States
城市	Hapuna Beach
期間	15-03-23 → 15-03-26

All Science Journal Classification (ASJC) codes

電氣與電子工程
硬體和架構

存取文件

10.1109/ISISS.2015.7102367

其它文件與鏈接

引用此

Wu, P. C., Liu, B. D., Yeh, C. Y., Chen, S. Y., Tsai, H. H., & Juang, Y. Z. (2015). A low-power interface circuit for multi-sensor applications. 於 2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings 文章 7102367 (2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISISS.2015.7102367

Wu, Po Chang ; Liu, Bin Da ; Yeh, Chih Yuan 等. / A low-power interface circuit for multi-sensor applications. 2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2015. (2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings).

@inproceedings{74ec0bbd81f4487699624848e2b1a1fc,

title = "A low-power interface circuit for multi-sensor applications",

abstract = "This paper presents a low-power generic readout circuit for capacitive and resistive complementary metaloxide-semiconductor (CMOS) micro-electro-mechanical-system (MEMS) sensors. This readout architecture can be scaled to even more sensors to achieve chip area and power consumption efficient. An incremental sigma-delta analog-to-digital converter (ΣΔ ADC) is used for providing multiplexed digital output. A demonstration chip was implemented in a 0.18-μm CMOS MEMS process, which integrates a three-axis accelerometer, the readout circuit, and an ARM M0 microprocessor. The chip area is 3.5×2.5 mm2 and the interface circuit with ADC draw only 120 mA of current from a 1.8-V supply. A magneto-resistance-type three-axis magnetic sensor is manufactured via extra post processes. This chip is designed to demonstrate a monolithic virtual gyroscope, which is a popular solution for low-power and low-cost inertial applications.",

author = "Wu, \{Po Chang\} and Liu, \{Bin Da\} and Yeh, \{Chih Yuan\} and Chen, \{Sih Yu\} and Tsai, \{Hann Huei\} and Juang, \{Ying Zong\}",

year = "2015",

month = may,

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doi = "10.1109/ISISS.2015.7102367",

language = "English",

series = "2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings",

address = "United States",

note = "2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 ; Conference date: 23-03-2015 Through 26-03-2015",

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Wu, PC, Liu, BD, Yeh, CY, Chen, SY, Tsai, HH & Juang, YZ 2015, A low-power interface circuit for multi-sensor applications. 於 2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings., 7102367, 2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015, Hapuna Beach, United States, 15-03-23. https://doi.org/10.1109/ISISS.2015.7102367

A low-power interface circuit for multi-sensor applications. / Wu, Po Chang; Liu, Bin Da; Yeh, Chih Yuan 等.
2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2015. 7102367 (2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings).

研究成果: Conference contribution

TY - GEN

T1 - A low-power interface circuit for multi-sensor applications

AU - Wu, Po Chang

AU - Liu, Bin Da

AU - Yeh, Chih Yuan

AU - Chen, Sih Yu

AU - Tsai, Hann Huei

AU - Juang, Ying Zong

PY - 2015/5/5

Y1 - 2015/5/5

N2 - This paper presents a low-power generic readout circuit for capacitive and resistive complementary metaloxide-semiconductor (CMOS) micro-electro-mechanical-system (MEMS) sensors. This readout architecture can be scaled to even more sensors to achieve chip area and power consumption efficient. An incremental sigma-delta analog-to-digital converter (ΣΔ ADC) is used for providing multiplexed digital output. A demonstration chip was implemented in a 0.18-μm CMOS MEMS process, which integrates a three-axis accelerometer, the readout circuit, and an ARM M0 microprocessor. The chip area is 3.5×2.5 mm2 and the interface circuit with ADC draw only 120 mA of current from a 1.8-V supply. A magneto-resistance-type three-axis magnetic sensor is manufactured via extra post processes. This chip is designed to demonstrate a monolithic virtual gyroscope, which is a popular solution for low-power and low-cost inertial applications.

AB - This paper presents a low-power generic readout circuit for capacitive and resistive complementary metaloxide-semiconductor (CMOS) micro-electro-mechanical-system (MEMS) sensors. This readout architecture can be scaled to even more sensors to achieve chip area and power consumption efficient. An incremental sigma-delta analog-to-digital converter (ΣΔ ADC) is used for providing multiplexed digital output. A demonstration chip was implemented in a 0.18-μm CMOS MEMS process, which integrates a three-axis accelerometer, the readout circuit, and an ARM M0 microprocessor. The chip area is 3.5×2.5 mm2 and the interface circuit with ADC draw only 120 mA of current from a 1.8-V supply. A magneto-resistance-type three-axis magnetic sensor is manufactured via extra post processes. This chip is designed to demonstrate a monolithic virtual gyroscope, which is a popular solution for low-power and low-cost inertial applications.

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DO - 10.1109/ISISS.2015.7102367

M3 - Conference contribution

AN - SCOPUS:84937141801

T3 - 2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings

BT - 2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015

Y2 - 23 March 2015 through 26 March 2015

ER -

Wu PC, Liu BD, Yeh CY, Chen SY, Tsai HH, Juang YZ. A low-power interface circuit for multi-sensor applications. 於 2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2015. 7102367. (2nd IEEE International Symposium on Inertial Sensors and Systems, IEEE ISISS 2015 - Proceedings). doi: 10.1109/ISISS.2015.7102367

A low-power interface circuit for multi-sensor applications

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