A macro model of silicon spiral inductor

C. Y. Su, L. P. Chen, S. J. Chang, B. M. Tseng, D. C. Lin, G. W. Huang, Y. P. Ho, H. Y. Lee, J. F. Kuan, W. Y. Wen, P. Liou, C. L. Chen, L. Y. Leu, K. A. Wen, C. Y. Chang

研究成果: Article同行評審

11 引文 斯高帕斯(Scopus)


A new automatic parameter extraction method for modeling of silicon spiral inductors is presented. The concepts on self-resonance frequency (fsr) and quality factor of a spiral inductor are utilized to develop the concise extraction procedures. In the mean time, the presented extraction procedures are programmed as a macro to execute all the extractions automatically and shorten the extraction time effectively. Without any additional optimization or curve fitting, almost all the patterns of S-parameters between the measured and the simulation of extracted data implemented with the extraction macro are less than 5%. The programmed extraction macro makes it fast and accurate to extract and characterize the behaviors of silicon-based spiral inductors with different structures and substrate resistivities. It provides a concrete foundation for commercial silicon radiofrequency (RF) circuit design to realizing on-chip silicon RF integrated circuits. Furthermore, the directly extracted equivalent model parameters, without any optimization, also provide a rule to fairly, effectively and physically judge the performance of a spiral inductor.

頁(從 - 到)759-767
期刊Solid-State Electronics
出版狀態Published - 2002 5月

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 凝聚態物理學
  • 電氣與電子工程
  • 材料化學


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