TY - GEN
T1 - A micro gas sensor based on a WO 3 thin film for aromatic hydrocarbon detection
AU - Lee, Chia Yen
AU - Su, Yu Hou
AU - Fu, Lung Ming
AU - Jiang, Joe Air
PY - 2011
Y1 - 2011
N2 - In the study, a novel gas sensor is presented for detection of aromatic hydrocarbons (benzene, toluene and xylene), consisting of a quartz substrate, Pt electrodes and a WO 3 thin film. Oxidation occurs on the heated WO 3 sensing layer as an aromatic hydrocarbon is present in the atmosphere, which causes a resistance variation of the WO 3 thin film. From the measured resistance change, the aromatic hydrocarbon concentration is then computed. It is found that the crystalline structure is more perfect as the as-sputtering substrate temperature is 300°C, the WO 3 thin film is annealed and the sputtering time is more than 6 hrs. At the optimal working temperature of 300°C, the experimental results show that the sensor has a rapid response time and a high degree of sensitivity for detection of benzene, toluene and xylene.
AB - In the study, a novel gas sensor is presented for detection of aromatic hydrocarbons (benzene, toluene and xylene), consisting of a quartz substrate, Pt electrodes and a WO 3 thin film. Oxidation occurs on the heated WO 3 sensing layer as an aromatic hydrocarbon is present in the atmosphere, which causes a resistance variation of the WO 3 thin film. From the measured resistance change, the aromatic hydrocarbon concentration is then computed. It is found that the crystalline structure is more perfect as the as-sputtering substrate temperature is 300°C, the WO 3 thin film is annealed and the sputtering time is more than 6 hrs. At the optimal working temperature of 300°C, the experimental results show that the sensor has a rapid response time and a high degree of sensitivity for detection of benzene, toluene and xylene.
UR - http://www.scopus.com/inward/record.url?scp=84863293812&partnerID=8YFLogxK
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U2 - 10.1109/ICSensT.2011.6136988
DO - 10.1109/ICSensT.2011.6136988
M3 - Conference contribution
AN - SCOPUS:84863293812
SN - 9781457701672
T3 - Proceedings of the International Conference on Sensing Technology, ICST
SP - 311
EP - 314
BT - 2011 5th International Conference on Sensing Technology, ICST 2011
T2 - 2011 5th International Conference on Sensing Technology, ICST 2011
Y2 - 28 November 2011 through 1 December 2011
ER -