A micro gas sensor based on a WO 3 thin film for aromatic hydrocarbon detection

Chia Yen Lee, Yu Hou Su, Lung-Ming Fu, Joe Air Jiang

研究成果: Conference contribution

摘要

In the study, a novel gas sensor is presented for detection of aromatic hydrocarbons (benzene, toluene and xylene), consisting of a quartz substrate, Pt electrodes and a WO 3 thin film. Oxidation occurs on the heated WO 3 sensing layer as an aromatic hydrocarbon is present in the atmosphere, which causes a resistance variation of the WO 3 thin film. From the measured resistance change, the aromatic hydrocarbon concentration is then computed. It is found that the crystalline structure is more perfect as the as-sputtering substrate temperature is 300°C, the WO 3 thin film is annealed and the sputtering time is more than 6 hrs. At the optimal working temperature of 300°C, the experimental results show that the sensor has a rapid response time and a high degree of sensitivity for detection of benzene, toluene and xylene.

原文English
主出版物標題2011 5th International Conference on Sensing Technology, ICST 2011
頁面311-314
頁數4
DOIs
出版狀態Published - 2011 十二月 1
事件2011 5th International Conference on Sensing Technology, ICST 2011 - Palmerston North, New Zealand
持續時間: 2011 十一月 282011 十二月 1

出版系列

名字Proceedings of the International Conference on Sensing Technology, ICST
ISSN(列印)2156-8065
ISSN(電子)2156-8073

Other

Other2011 5th International Conference on Sensing Technology, ICST 2011
國家New Zealand
城市Palmerston North
期間11-11-2811-12-01

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Computer Science Applications
  • Signal Processing
  • Electrical and Electronic Engineering

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