A Microcantilever-based gas flow sensor for flow rate and direction detection

Yu Hsiang Wang, Tzu Han Hsueh, Rong Hua Ma, Chia Yen Lee, Lung Ming Fu, Po Cheng Chou, Chien Hsiung Tsai

研究成果: Conference contribution

4 引文 斯高帕斯(Scopus)

摘要

The purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses a silicon wafer deposited silicon nitride layers, reassembled the gas flow sensor with four cantilever beams that perpendicular to each other and manufactured piezoresistive structure on each micro-cantilever by MEMS technologies, respectively. When the cantilever beams are formed after etching the silicon wafer, it bends up a little due to the released residual stress induced in the previous fabrication process. As air flows through the sensor upstream and downstream beam deformation was made, thus the airflow direction can be determined through comparing the resistance variation between different cantilever beams. The flow rate can also be measured by calculating the total resistance variations on the four cantilevers.

原文English
主出版物標題DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
頁面142-145
頁數4
DOIs
出版狀態Published - 2008
事件DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Nice, France
持續時間: 2008 四月 92008 四月 11

出版系列

名字DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Other

OtherDTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
國家/地區France
城市Nice
期間08-04-0908-04-11

All Science Journal Classification (ASJC) codes

  • 硬體和架構
  • 電氣與電子工程

指紋

深入研究「A Microcantilever-based gas flow sensor for flow rate and direction detection」主題。共同形成了獨特的指紋。

引用此