A microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy

Song Xu, Chih Hsien Huang, Jun Zou

研究成果: Conference contribution

2 引文 斯高帕斯(Scopus)

摘要

Micro scanning mirrors that can operate reliably under water is useful in both ultrasound and photoacoustic microscopic imaging, where fast scanning of focused high-frequency ultrasound beams is desired for pixel-by-pixel data acquisition. This paper reports the development of a new micro-fabricated water-immersible scanning mirror with a small form factor. It consists of an optically and acoustically reflective mirror plate, which is supported onto two flexible polymer hinges and driven by an integrated electromagnetic micro-actuator. It can achieve one-axis scanning of ±12.1° at a resonant frequency of 250Hz in air and 210Hz in water, respectively. By optimizing the design and enhancing the fabrication with high-precision optical 3D printing, the overall size of the scanning mirror module is less than 7 mm × 5 mm × 7 mm. The small form factor, large scanning angle, and high resonant frequency of the new water-immersible scanning mirror make it suitable for building compact handheld imaging probes for in-vivo high-speed and wide-field ultrasound and photoacoustic microscopy.

原文English
主出版物標題MOEMS and Miniaturized Systems XV
編輯Wibool Piyawattanametha, Yong-Hwa Park
發行者SPIE
ISBN(電子)9781628419955
DOIs
出版狀態Published - 2016 一月 1
事件MOEMS and Miniaturized Systems XV - San Francisco, United States
持續時間: 2016 二月 152016 二月 17

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
9760
ISSN(列印)0277-786X
ISSN(電子)1996-756X

Other

OtherMOEMS and Miniaturized Systems XV
國家United States
城市San Francisco
期間16-02-1516-02-17

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • 引用此

    Xu, S., Huang, C. H., & Zou, J. (2016). A microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy. 於 W. Piyawattanametha, & Y-H. Park (編輯), MOEMS and Miniaturized Systems XV [976002] (Proceedings of SPIE - The International Society for Optical Engineering; 卷 9760). SPIE. https://doi.org/10.1117/12.2211746