A Microwave Resonator Biosensor Based on MEMS Technology and Rough Cu Electrodes for Biological Cell Detection

Chia Feng Liu, Pao Cheng Huang, Min Haw Wang, Chun Hong Chen, Ling Sheng Jang

研究成果: Conference contribution

摘要

This work presents a near-field microwave resonant sensor combining with a micro-channel for detecting biological cells. The hairpin biosensor with a high-Q dielectric resonator allows the detection of a small variation of DUT in the microchannel by measuring the scattering parameters responses at resonance of around 2.2 GHz. The sensor was constructed by using microelectromechanical-system (MEMS) technology. Cu electroplating technique was used to fabricate 14-μm-thick Cu electrodes to reduce the transmission loss caused by the rough surface of electrodes and to match the size of cells. Measurements of Dulbecco's modified Eagle's medium (DMEM) and B16F10 melanoma cells (mus musculus skin melanoma) were performed. The results showed that the thick Cu electrodes provided two advantages: loss reduction and cell detection sensitivity. These analysis results are helpful for further applications such as cell trapping, measurement, and characteristics.

原文English
主出版物標題2019 IEEE International Conference on Consumer Electronics - Taiwan, ICCE-TW 2019
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9781728132792
DOIs
出版狀態Published - 2019 五月
事件6th IEEE International Conference on Consumer Electronics - Taiwan, ICCE-TW 2019 - Yilan, Taiwan
持續時間: 2019 五月 202019 五月 22

出版系列

名字2019 IEEE International Conference on Consumer Electronics - Taiwan, ICCE-TW 2019

Conference

Conference6th IEEE International Conference on Consumer Electronics - Taiwan, ICCE-TW 2019
國家Taiwan
城市Yilan
期間19-05-2019-05-22

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Computer Science Applications
  • Computer Vision and Pattern Recognition
  • Electrical and Electronic Engineering

指紋 深入研究「A Microwave Resonator Biosensor Based on MEMS Technology and Rough Cu Electrodes for Biological Cell Detection」主題。共同形成了獨特的指紋。

引用此