A new water-immersible two-axis MEMS scanning mirror for photoacoustic microscopy

Song Xu, Chih Hsien Huang, Jun Zou

研究成果: Conference contribution

摘要

A new water-immersible two-axis MEMS scanning mirror has been designed, fabricated, and tested for both laser and ultrasound beam steering. The two scanning axes have very different resonance frequencies, which are suitable for raster scanning.

原文English
主出版物標題Optical Tomography and Spectroscopy, OTS 2016
發行者OSA - The Optical Society
頁數1
ISBN(列印)9781943580101
出版狀態Published - 2016 四月 18
事件Optical Tomography and Spectroscopy, OTS 2016 - Fort Lauderdale, United States
持續時間: 2016 四月 252016 四月 28

出版系列

名字Optics InfoBase Conference Papers

Other

OtherOptical Tomography and Spectroscopy, OTS 2016
國家United States
城市Fort Lauderdale
期間16-04-2516-04-28

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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  • 引用此

    Xu, S., Huang, C. H., & Zou, J. (2016). A new water-immersible two-axis MEMS scanning mirror for photoacoustic microscopy. 於 Optical Tomography and Spectroscopy, OTS 2016 (Optics InfoBase Conference Papers). OSA - The Optical Society.