TY - JOUR
T1 - A novel automatic virtual metrology system architecture for TFT-LCD industry based on main memory database
AU - Hung, Min Hsiung
AU - Tsai, Wen Huang
AU - Yang, Haw Ching
AU - Kao, Yi Jhong
AU - Cheng, Fan Tien
N1 - Funding Information:
The authors would like to thank the National Science Council of Republic of China for financially supporting this research under Contract no: NSC-99–2221-E-034-017 to M.-H. Hung and Contract no: NSC-98–2622-E-006–009 to F.-T. Cheng. This work was also supported by the Landmark Project of National Cheng Kung University to F.-T. Cheng.
PY - 2012/8
Y1 - 2012/8
N2 - The semiconductor and thin-film-transistorliquid-crystal-display (TFT-LCD) industries widely value Automatic Virtual Metrology System (AVMS). AVMS needs to handle a large volume of VM-related data, which may cause poor internal database performance. In general, AVMS adopts efficient but expensive commercial database management systems (DBMSs) to yield good AVMS performance. This usually makes the AVMS construction cost very high. Therefore, the industries require a novel AVMS architecture with lower cost and greater efficiency in database. This paper proposes a novel AVMS architecture based on Main Memory Database (MMDB) technology. Specifically, the MMDB is used to improve the performance bottlenecks of the current Disk Resident Database (DRDB). Also, we design automatic data-backup and automatic data-query sources integration mechanisms to effectively relieve rapidly increased data volume in the original AVMS architecture. In addition, the novel AVMS architecture adopts a free commercial MMDB to significantly reduce total system cost. Integrated testing results show that the proposed AVMS architecture and developed technologies can enable the AVMS to have better data-storage efficiency, superior data-query performance, and lower database cost. The proposed AVMS architecture and research results in this paper can be a useful reference for TFT-LCD manufacturing companies in constructing their own AVM systems. The proposed AVMS architecture can also be applied in the semiconductor and solar-cell industries.
AB - The semiconductor and thin-film-transistorliquid-crystal-display (TFT-LCD) industries widely value Automatic Virtual Metrology System (AVMS). AVMS needs to handle a large volume of VM-related data, which may cause poor internal database performance. In general, AVMS adopts efficient but expensive commercial database management systems (DBMSs) to yield good AVMS performance. This usually makes the AVMS construction cost very high. Therefore, the industries require a novel AVMS architecture with lower cost and greater efficiency in database. This paper proposes a novel AVMS architecture based on Main Memory Database (MMDB) technology. Specifically, the MMDB is used to improve the performance bottlenecks of the current Disk Resident Database (DRDB). Also, we design automatic data-backup and automatic data-query sources integration mechanisms to effectively relieve rapidly increased data volume in the original AVMS architecture. In addition, the novel AVMS architecture adopts a free commercial MMDB to significantly reduce total system cost. Integrated testing results show that the proposed AVMS architecture and developed technologies can enable the AVMS to have better data-storage efficiency, superior data-query performance, and lower database cost. The proposed AVMS architecture and research results in this paper can be a useful reference for TFT-LCD manufacturing companies in constructing their own AVM systems. The proposed AVMS architecture can also be applied in the semiconductor and solar-cell industries.
UR - http://www.scopus.com/inward/record.url?scp=84862790077&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84862790077&partnerID=8YFLogxK
U2 - 10.1016/j.rcim.2012.01.002
DO - 10.1016/j.rcim.2012.01.002
M3 - Article
AN - SCOPUS:84862790077
SN - 0736-5845
VL - 28
SP - 559
EP - 568
JO - Computer Integrated Manufacturing Systems
JF - Computer Integrated Manufacturing Systems
IS - 4
ER -