A novel automatic virtual metrology system architecture for TFT-LCD industry based on main memory database

Min Hsiung Hung, Wen Huang Tsai, Haw Ching Yang, Yi Jhong Kao, Fan Tien Cheng

研究成果: Article同行評審

12 引文 斯高帕斯(Scopus)


The semiconductor and thin-film-transistorliquid-crystal-display (TFT-LCD) industries widely value Automatic Virtual Metrology System (AVMS). AVMS needs to handle a large volume of VM-related data, which may cause poor internal database performance. In general, AVMS adopts efficient but expensive commercial database management systems (DBMSs) to yield good AVMS performance. This usually makes the AVMS construction cost very high. Therefore, the industries require a novel AVMS architecture with lower cost and greater efficiency in database. This paper proposes a novel AVMS architecture based on Main Memory Database (MMDB) technology. Specifically, the MMDB is used to improve the performance bottlenecks of the current Disk Resident Database (DRDB). Also, we design automatic data-backup and automatic data-query sources integration mechanisms to effectively relieve rapidly increased data volume in the original AVMS architecture. In addition, the novel AVMS architecture adopts a free commercial MMDB to significantly reduce total system cost. Integrated testing results show that the proposed AVMS architecture and developed technologies can enable the AVMS to have better data-storage efficiency, superior data-query performance, and lower database cost. The proposed AVMS architecture and research results in this paper can be a useful reference for TFT-LCD manufacturing companies in constructing their own AVM systems. The proposed AVMS architecture can also be applied in the semiconductor and solar-cell industries.

頁(從 - 到)559-568
期刊Robotics and Computer-Integrated Manufacturing
出版狀態Published - 2012 8月

All Science Journal Classification (ASJC) codes

  • 控制與系統工程
  • 軟體
  • 數學(全部)
  • 電腦科學應用
  • 工業與製造工程


深入研究「A novel automatic virtual metrology system architecture for TFT-LCD industry based on main memory database」主題。共同形成了獨特的指紋。