A novel contact imprinting lithography for nano-patterning and nano-fabrication

Yung-Chun Lee, C. Y. Chiu

研究成果: Conference contribution

原文English
主出版物標題Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
頁面444-445
頁數2
DOIs
出版狀態Published - 2007 十二月 1
事件s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan
持續時間: 2007 十一月 52007 十一月 8

出版系列

名字Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Other

Others20th International Microprocesses and Nanotechnology Conference, MNC 2007
國家Japan
城市Kyoto
期間07-11-0507-11-08

指紋

Nanotechnology
Lithography

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

引用此文

Lee, Y-C., & Chiu, C. Y. (2007). A novel contact imprinting lithography for nano-patterning and nano-fabrication. 於 Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (頁 444-445). [4456295] (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456295
Lee, Yung-Chun ; Chiu, C. Y. / A novel contact imprinting lithography for nano-patterning and nano-fabrication. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. 頁 444-445 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).
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Lee, Y-C & Chiu, CY 2007, A novel contact imprinting lithography for nano-patterning and nano-fabrication. 於 Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456295, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, 頁 444-445, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 07-11-05. https://doi.org/10.1109/IMNC.2007.4456295

A novel contact imprinting lithography for nano-patterning and nano-fabrication. / Lee, Yung-Chun; Chiu, C. Y.

Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 444-445 4456295 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

研究成果: Conference contribution

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Lee Y-C, Chiu CY. A novel contact imprinting lithography for nano-patterning and nano-fabrication. 於 Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 444-445. 4456295. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456295