A phase-shift resonant power system with novel plasma impedance measurement methodology for plasma cleaning applications

Ming Hsien Cheng, Tsorng-Juu Liang, Shih Ming Chen

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

Plasma cleaning has been broadly applied to remove impurities and contaminants from flexible substrates. The equivalent resistance of a plasma load is a very important factor for power measurement. However, the conventional Lissajous figure method requires an external capacitor serially connected to the plasma load, which conducts the DC bias and leads to large measurement deviation. Moreover, conventional plasma cleaning power supplies adopt a high turns ratio but a low-efficiency transformer to drive the plasma load. This study proposes an accurate plasma impedance measurement methodology that does not require an external capacitor and applies it to a parallel resonant full-bridge inverter. A digital signal processor is used to derive the equivalent impedances and estimate the output power and efficiency of the plasma load to achieve constant power control for a plasma power supply system. Based on experimental results, the calculated efficiency is very close to measured efficiency. A prototype inverter under phase-shift control is found presenting efficiency of 88.1% at a full load of 3 kW and 81.5% at a light load of 1 kW respectively.

原文English
主出版物標題2017 IEEE 3rd International Future Energy Electronics Conference and ECCE Asia, IFEEC - ECCE Asia 2017
發行者Institute of Electrical and Electronics Engineers Inc.
頁面698-703
頁數6
ISBN(電子)9781509051571
DOIs
出版狀態Published - 2017 七月 25
事件3rd IEEE International Future Energy Electronics Conference and ECCE Asia, IFEEC - ECCE Asia 2017 - Kaohsiung, Taiwan
持續時間: 2017 六月 32017 六月 7

出版系列

名字2017 IEEE 3rd International Future Energy Electronics Conference and ECCE Asia, IFEEC - ECCE Asia 2017

Other

Other3rd IEEE International Future Energy Electronics Conference and ECCE Asia, IFEEC - ECCE Asia 2017
國家/地區Taiwan
城市Kaohsiung
期間17-06-0317-06-07

All Science Journal Classification (ASJC) codes

  • 能源工程與電力技術
  • 電氣與電子工程
  • 控制和優化

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