TY - JOUR
T1 - A review of feedforward control approaches in nanopositioning for high-speed spm
AU - Clayton, Garrett M.
AU - Tien, Szuchi
AU - Leang, Kam K.
AU - Zou, Qingze
AU - Devasia, Santosh
PY - 2009/11
Y1 - 2009/11
N2 - Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies. In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth. This article reviews inversion-based feedforward approaches used for high-speed SPMs such as optimal inversion that accounts for model uncertainty and inversion-based iterative control for repetitive applications. The article establishes connections to other existing methods such as zero-phase-error-tracking feedforward and robust feedforward. Additionally, the article reviews the use of feedforward in emerging applications such as SPM-based nanoscale combinatorial-science studies, image-based control for subnanometer-scale studies, and imaging of large soft biosamples with SPMs.
AB - Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies. In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth. This article reviews inversion-based feedforward approaches used for high-speed SPMs such as optimal inversion that accounts for model uncertainty and inversion-based iterative control for repetitive applications. The article establishes connections to other existing methods such as zero-phase-error-tracking feedforward and robust feedforward. Additionally, the article reviews the use of feedforward in emerging applications such as SPM-based nanoscale combinatorial-science studies, image-based control for subnanometer-scale studies, and imaging of large soft biosamples with SPMs.
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U2 - 10.1115/1.4000158
DO - 10.1115/1.4000158
M3 - Review article
AN - SCOPUS:77955509062
VL - 131
SP - 1
EP - 19
JO - Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME
JF - Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME
SN - 0022-0434
IS - 6
ER -