A secure collaborative e-Diagnostics framework for semiconductor factories

Min Hsiung Hung, Feng Yi Hsu, Tsung Li Wang, Fan Tien Cheng, Robin Lai, Tina Huang

研究成果: Conference contribution

摘要

According to the collaborative Diagnostics functions and the interface C requirements suggested in the recent e-Diagnostics guidebook of International SEMATECH, this paper proposes a novel e-Diagnostics framework, called Secure Collaborative e-Diagnostics Framework (SCDF). SCDF is developed based on the technologies of Web Services, clustering, and new-generation information security. In addition to providing a variety of e-diagnostics functions, SCDF possesses mechanisms to solve several important issues, such as data isolation for different suppliers, supporting remote diagnoses through multi-party collaboration, diagnostics service and storage failover for assuring system availability and the security measures related to above issues. SCDF provides a possible solution to part of the e-Diagnostics interface C and can be applied in semiconductor industry to increase the equipment effectiveness and availability.

原文English
主出版物標題Proceedings of the 2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005
頁面185-190
頁數6
DOIs
出版狀態Published - 2005 12月 1
事件2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005 - Edmonton, Canada
持續時間: 2005 8月 12005 8月 2

出版系列

名字Proceedings of the 2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005
2005

Other

Other2005 IEEE Conference on Automation Science and Engineering, IEEE-CASE 2005
國家/地區Canada
城市Edmonton
期間05-08-0105-08-02

All Science Journal Classification (ASJC) codes

  • 一般工程

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