A solution flow system for hydrothermal-electrochemical growth of multilayered thin films

Wojciech L. Suchanek, Tomoaki Watanabe, Bungo Sakurai, Naoki Kumagai, Masahiro Yoshimura

研究成果: Article同行評審

20 引文 斯高帕斯(Scopus)


A solution flow system equipment for hydrothermal-electrochemical synthesis of advanced thin films has been designed, constructed, and successfully tested. The synthesis using recyclable (aqueous) solutions as precursors can be carried out up to temperature of 200°C and pressure of 50 kg cm-2 utilizing electrochemical activation of the nucleation and growth processes. Any clear solution can be used as a precursor; there are almost no limitations of the substrates used. The equipment is easy to use, versatile, and inexpensive. Applicability of the solution flow system for synthesis of advanced materials has been demonstrated using single-layer and multilayer BaTiO3-SrTiO3 thin films. Our equipment allows control of the microstructure of the films in a nanometric scale by changing the preparation conditions, for example the growth rate can be increased by increasing the flow rate. In addition, the multilayered films can be prepared in only one experiment just by changing the kind of flowing solution. The technique using the solution flow under the hydrothermal-electrochemical conditions is an important step in integration of the solution processing with the advanced device technology.

頁(從 - 到)2432-2437
期刊Review of Scientific Instruments
出版狀態Published - 1999 一月 1

All Science Journal Classification (ASJC) codes

  • 儀器


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