A study of Love wave devices in ZnO/Quartz and ZnO/LiTaO3 structures

Ren Chuan Chang, Sheng Yuan Chu, Cheng Shong Hong, Yu Ting Chuang

研究成果: Conference article同行評審

26 引文 斯高帕斯(Scopus)

摘要

Love wave devices are very promising for sensing applications because of high sensitivity. In this paper, ZnO thin films doped with lithium (Li) and magnesium (Mg) were deposited on the 42°45′ ST-cut quartz and 36° YX-LiTaO3 substrates by RF magnetron sputtering technique. XRD, SEM, and AFM measurements investigated characteristics of the films. Under different conditions such as doping content, layer thickness, and substrate temperature, the phase velocity, temperature coefficient of frequency, electromechanical coupling coefficient and sensitivity of Love wave devices in ZnO/Quartz and ZnO/LiTaO3 structures are presented. The maximum sensitivities of ZnO/Quartz and ZnO/LiTaO3 are much higher than the SiO 2/Quartz and SiO2/LiTaO3 structures reported.

原文English
頁(從 - 到)146-151
頁數6
期刊Thin Solid Films
498
發行號1-2
DOIs
出版狀態Published - 2006 三月 1
事件Proceedings of the Third Asian Conference on Chemical Vapor Deposition (Third Asian-CVD), Third Asian CVD -
持續時間: 2004 十一月 122004 十一月 14

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 表面和介面
  • 表面、塗料和薄膜
  • 金屬和合金
  • 材料化學

指紋

深入研究「A study of Love wave devices in ZnO/Quartz and ZnO/LiTaO<sub>3</sub> structures」主題。共同形成了獨特的指紋。

引用此