A study on crystallization, optical and electrical properties of the advanced ZITO thin films using co-sputtering system

K. J. Chen, F. Y. Hung, S. J. Chang, S. P. Chang, Y. C. Mai, Z. S. Hu

研究成果: Article同行評審

12 引文 斯高帕斯(Scopus)

摘要

Multi-functions (conductor, semiconductor and insulator) ZnInSnO (ZITO) transparent oxide thin films have been obtained by a co-sputtering system using ITO target and ZnO target with oxygen gas contents (0-8%). The ZITO film containing a small ITO content had the lowest resistivity (good electron mobility) and higher optical transmittance. In addition, the influences of thermal treatments (post-annealing and substrate temperature) on electrical properties and optical transmittance of ZITO films were studied. Photoluminescence (PL) of the ZITO film confirmed the contribution of ITO content and oxygen gas content on the photo-emission. The ZITO film with zinc atomic concentration of 58 at.% was a good candidate for TCO material (3.08 × 10-4 Ω cm). Under the substrate temperature of 100 °C or post-annealing temperature of 200 °C, the properties of ZITO film could be improved.

原文English
頁(從 - 到)3667-3671
頁數5
期刊Journal of Alloys and Compounds
509
發行號8
DOIs
出版狀態Published - 2011 二月 24

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry

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