A two-axis water-immersible MEMS scanning mirror for scanning optical and acoustic microscopy

Song Xu, Chih Hsien Huang, Jun Zou

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

Fast scanning is highly desired for both ultrasound and photoacoustic microscopic imaging. Limited by water environment required for acoustic propagation, traditional mircoelectromechanical system (MEMS) scanning mirrors could not be widely used. In this paper, a new water-immersible scanning mirror microsystem has been designed, fabricated and tested. Polymer hinges were employed to achieve reliable under water performance. Two pairs of high strength neodymium magnet disc and three compact RF choke inductor were used to actuate mirror module. Experimental results show that the fast axis can reach a mechanical scanning angle of ±15° at the resonance frequency of 350 Hz in air, and ±12.5° at the resonance frequency of 240 Hz in water, respectively. The slow axis can reach a mechanical scanning angle of ±15° at the resonance frequency of 20 Hz in air, and ±12.5° at the resonance frequency of 13 Hz in water, respectively. The two scanning axes have very different resonance frequencies, which are suitable for raster scanning.

原文English
主出版物標題MOEMS and Miniaturized Systems XV
編輯Wibool Piyawattanametha, Yong-Hwa Park
發行者SPIE
ISBN(電子)9781628419955
DOIs
出版狀態Published - 2016 一月 1
事件MOEMS and Miniaturized Systems XV - San Francisco, United States
持續時間: 2016 二月 152016 二月 17

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
9760
ISSN(列印)0277-786X
ISSN(電子)1996-756X

Other

OtherMOEMS and Miniaturized Systems XV
國家United States
城市San Francisco
期間16-02-1516-02-17

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • 引用此

    Xu, S., Huang, C. H., & Zou, J. (2016). A two-axis water-immersible MEMS scanning mirror for scanning optical and acoustic microscopy. 於 W. Piyawattanametha, & Y-H. Park (編輯), MOEMS and Miniaturized Systems XV [976003] (Proceedings of SPIE - The International Society for Optical Engineering; 卷 9760). SPIE. https://doi.org/10.1117/12.2211752