A water-immersible 2-Axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applications

Chih-Hsien Huang, Junjie Yao, Lihong V. Wang, Jun Zou

研究成果: Conference contribution

摘要

For both ultrasound and photoacoustic microscopic imaging, a fast scanning ability is required, whereas the liquid environment for acoustic propagation limits the usage of traditional MEMS scanning mirrors. In this paper, a new waterimmersible scanning mirror microsystem has been designed, fabricated and tested. To achieve reliable underwater scanning, flexible polymer torsion hinges fabricated by laser micromachining were used to support the reflective silicon mirror plate. Two efficient electromagnetic microactuators consisting of compact RF choke inductors and high-strength neodymium magnet disc were constructed to drive the silicon mirror plate around a fast axis and a slow axis, respectively. The performance of the water-immersible scanning mirror microsystem in both air and water were tested using the laser tracing method. For the fast axis, the resonance frequency reached 224 Hz in air and 164 Hz in water, respectively. The scanning angles in air and water under ±10 V AC driving (at the resonance frequencies) were ±13.6° and ±10°. The scanning angles in both air and water under ±16 V DC driving were ±12°. For the slow axis, the resonance frequency reached 55 Hz in air and 38 Hz in water, respectively. The scanning angles in air and water under ±10 V AC driving (at the resonance frequencies) were ±8.5° and ±6°. The scanning angles in both air and water under ±10 V DC driving were ± 6.5°. The feasibility of using such a water-immersible scanning mirror microsystem for scanning ultrasound microscopic (SAM) imaging has been demonstrated with a 25-MHz ultrasound pulse/echo system and a target consisting of three optical fibers.

原文English
主出版物標題MOEMS and Miniaturized Systems XII
DOIs
出版狀態Published - 2013 六月 12
事件MOEMS and Miniaturized Systems XII - San Francisco, CA, United States
持續時間: 2013 二月 42013 二月 6

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
8616
ISSN(列印)0277-786X

Other

OtherMOEMS and Miniaturized Systems XII
國家United States
城市San Francisco, CA
期間13-02-0413-02-06

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

指紋 深入研究「A water-immersible 2-Axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applications」主題。共同形成了獨特的指紋。

  • 引用此

    Huang, C-H., Yao, J., Wang, L. V., & Zou, J. (2013). A water-immersible 2-Axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applications. 於 MOEMS and Miniaturized Systems XII [861607] (Proceedings of SPIE - The International Society for Optical Engineering; 卷 8616). https://doi.org/10.1117/12.2003087