TY - JOUR
T1 - A wear-resistant coating-Oxidized graded multilayer TiN/W coating
AU - Yao, S. H.
AU - Su, Y. L.
AU - Kao, W. H.
AU - Cheng, K. W.
N1 - Funding Information:
The authors would like to express their gratitude for the financial support by National Science Council under the contract of NSC95-2221-E-309-004 .
PY - 2010/1/15
Y1 - 2010/1/15
N2 - Combining sputtering technology using an industrial-scale four-target DC closed-field unbalanced magnetron sputtering ion plating system (CFUBMSIPS™) with post heat treatment, a graded multilayer TiN/W coating, consisting of five layers, was synthesized and its outmost W layer was transformed to lubricious WO3 successfully. The coatings were characterized by using GDOES, GXRD, a Rockwell C indentation tester, a nanoindentation tester, and a scratching tester. Wear behavior of coatings was evaluated by using a pin-on-disc tribometer. Through proper post heat treatment, the multilayer TiN/W coating, in spite of having a lower nano-hardness, showed good adhesion, much better wear performance and lower friction coefficient compared with the reference monolayer TiN coating.
AB - Combining sputtering technology using an industrial-scale four-target DC closed-field unbalanced magnetron sputtering ion plating system (CFUBMSIPS™) with post heat treatment, a graded multilayer TiN/W coating, consisting of five layers, was synthesized and its outmost W layer was transformed to lubricious WO3 successfully. The coatings were characterized by using GDOES, GXRD, a Rockwell C indentation tester, a nanoindentation tester, and a scratching tester. Wear behavior of coatings was evaluated by using a pin-on-disc tribometer. Through proper post heat treatment, the multilayer TiN/W coating, in spite of having a lower nano-hardness, showed good adhesion, much better wear performance and lower friction coefficient compared with the reference monolayer TiN coating.
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U2 - 10.1016/j.matlet.2009.10.026
DO - 10.1016/j.matlet.2009.10.026
M3 - Article
AN - SCOPUS:70449523258
SN - 0167-577X
VL - 64
SP - 99
EP - 101
JO - Materials Letters
JF - Materials Letters
IS - 1
ER -