A wear-resistant coating-Oxidized graded multilayer TiN/W coating

S. H. Yao, Y. L. Su, W. H. Kao, K. W. Cheng

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12 引文 斯高帕斯(Scopus)


Combining sputtering technology using an industrial-scale four-target DC closed-field unbalanced magnetron sputtering ion plating system (CFUBMSIPS™) with post heat treatment, a graded multilayer TiN/W coating, consisting of five layers, was synthesized and its outmost W layer was transformed to lubricious WO3 successfully. The coatings were characterized by using GDOES, GXRD, a Rockwell C indentation tester, a nanoindentation tester, and a scratching tester. Wear behavior of coatings was evaluated by using a pin-on-disc tribometer. Through proper post heat treatment, the multilayer TiN/W coating, in spite of having a lower nano-hardness, showed good adhesion, much better wear performance and lower friction coefficient compared with the reference monolayer TiN coating.

頁(從 - 到)99-101
期刊Materials Letters
出版狀態Published - 2010 1月 15

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 凝聚態物理學
  • 材料力學
  • 機械工業


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