A WO3 nanoparticles NO gas sensor prepared by hot-wire CVD

Chih Hung Lin, Shoou Jinn Chang, Ting Jen Hsueh

研究成果: Review article

11 引文 (Scopus)

摘要

In this letter, a WO3 nanoparticle gas sensor was fabricated using an ICP-assisted hot wire system. The results of experiments indicated that the sensitivity became smaller when the measured temperature increased. It was also found that the WO3 nanoparticle gas sensor prepared at an annealing temperature of 400 °C had the greatest sensitivity. The measured sensitivity for a micro-electromechanical system type WO3 nanoparticle gas sensor was found to be around 3.22, 3.91, 5.02, 7.52, 11.68, and 15.93 when the operating temperature of the micro-heater was 150 °C and the concentration of injected NO gas was 100, 150, 200, 250, 300, and 350 ppb, respectively.

原文English
文章編號7803548
頁(從 - 到)266-269
頁數4
期刊IEEE Electron Device Letters
38
發行號2
DOIs
出版狀態Published - 2017 二月

指紋

Chemical sensors
Chemical vapor deposition
Wire
Nanoparticles
Temperature
MEMS
Gases
Annealing
Experiments

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

引用此文

Lin, Chih Hung ; Chang, Shoou Jinn ; Hsueh, Ting Jen. / A WO3 nanoparticles NO gas sensor prepared by hot-wire CVD. 於: IEEE Electron Device Letters. 2017 ; 卷 38, 編號 2. 頁 266-269.
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A WO3 nanoparticles NO gas sensor prepared by hot-wire CVD. / Lin, Chih Hung; Chang, Shoou Jinn; Hsueh, Ting Jen.

於: IEEE Electron Device Letters, 卷 38, 編號 2, 7803548, 02.2017, p. 266-269.

研究成果: Review article

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