A ZnO nanowire-based humidity sensor

Sheng Po Chang, Shoou Jinn Chang, Chien Yuan Lu, Meng Ju Li, Cheng Liang Hsu, Yu Zung Chiou, Ting Jen Hsueh, I. Cherng Chen

研究成果: Article

83 引文 (Scopus)

摘要

In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80°C, it was found that measured resistances were 5.9×105, 4.3×105, 3.7×105 and 3.2×105Ω when measured with 25%, 50%, 70% and 90% relative humidity, respectively.

原文English
頁(從 - 到)772-778
頁數7
期刊Superlattices and Microstructures
47
發行號6
DOIs
出版狀態Published - 2010 六月 1

指紋

Humidity sensors
Nanowires
humidity
nanowires
sensors
Current voltage characteristics
Atmospheric humidity
templates
Crystalline materials
Electrodes
electrodes
electric potential

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

引用此文

Chang, S. P., Chang, S. J., Lu, C. Y., Li, M. J., Hsu, C. L., Chiou, Y. Z., ... Chen, I. C. (2010). A ZnO nanowire-based humidity sensor. Superlattices and Microstructures, 47(6), 772-778. https://doi.org/10.1016/j.spmi.2010.03.006
Chang, Sheng Po ; Chang, Shoou Jinn ; Lu, Chien Yuan ; Li, Meng Ju ; Hsu, Cheng Liang ; Chiou, Yu Zung ; Hsueh, Ting Jen ; Chen, I. Cherng. / A ZnO nanowire-based humidity sensor. 於: Superlattices and Microstructures. 2010 ; 卷 47, 編號 6. 頁 772-778.
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abstract = "In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80°C, it was found that measured resistances were 5.9×105, 4.3×105, 3.7×105 and 3.2×105Ω when measured with 25{\%}, 50{\%}, 70{\%} and 90{\%} relative humidity, respectively.",
author = "Chang, {Sheng Po} and Chang, {Shoou Jinn} and Lu, {Chien Yuan} and Li, {Meng Ju} and Hsu, {Cheng Liang} and Chiou, {Yu Zung} and Hsueh, {Ting Jen} and Chen, {I. Cherng}",
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Chang, SP, Chang, SJ, Lu, CY, Li, MJ, Hsu, CL, Chiou, YZ, Hsueh, TJ & Chen, IC 2010, 'A ZnO nanowire-based humidity sensor', Superlattices and Microstructures, 卷 47, 編號 6, 頁 772-778. https://doi.org/10.1016/j.spmi.2010.03.006

A ZnO nanowire-based humidity sensor. / Chang, Sheng Po; Chang, Shoou Jinn; Lu, Chien Yuan; Li, Meng Ju; Hsu, Cheng Liang; Chiou, Yu Zung; Hsueh, Ting Jen; Chen, I. Cherng.

於: Superlattices and Microstructures, 卷 47, 編號 6, 01.06.2010, p. 772-778.

研究成果: Article

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AU - Chang, Sheng Po

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AU - Hsu, Cheng Liang

AU - Chiou, Yu Zung

AU - Hsueh, Ting Jen

AU - Chen, I. Cherng

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AB - In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80°C, it was found that measured resistances were 5.9×105, 4.3×105, 3.7×105 and 3.2×105Ω when measured with 25%, 50%, 70% and 90% relative humidity, respectively.

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