A ZnO nanowire-based humidity sensor

Sheng Po Chang; Shoou Jinn Chang; Chien Yuan Lu; Meng Ju Li; Cheng Liang Hsu; Yu Zung Chiou; Ting Jen Hsueh; I. Cherng Chen

doi:10.1016/j.spmi.2010.03.006

A ZnO nanowire-based humidity sensor

Sheng Po Chang, Shoou Jinn Chang, Chien Yuan Lu, Meng Ju Li, Cheng Liang Hsu, Yu Zung Chiou, Ting Jen Hsueh, I. Cherng Chen

研究成果: Article › 同行評審

124 引文斯高帕斯（Scopus）

摘要

In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO₂/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80°C, it was found that measured resistances were 5.9×10⁵, 4.3×10⁵, 3.7×10⁵ and 3.2×10⁵Ω when measured with 25%, 50%, 70% and 90% relative humidity, respectively.

原文	English
頁（從 - 到）	772-778
頁數	7
期刊	Superlattices and Microstructures
卷	47
發行號	6
DOIs	https://doi.org/10.1016/j.spmi.2010.03.006
出版狀態	Published - 2010 6月

All Science Journal Classification (ASJC) codes

一般材料科學
凝聚態物理學
電氣與電子工程

存取文件

10.1016/j.spmi.2010.03.006

其它文件與鏈接

引用此

@article{e0212bf02a0240c6987da222d834fe27,

title = "A ZnO nanowire-based humidity sensor",

abstract = "In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80°C, it was found that measured resistances were 5.9×105, 4.3×105, 3.7×105 and 3.2×105Ω when measured with 25%, 50%, 70% and 90% relative humidity, respectively.",

author = "Chang, {Sheng Po} and Chang, {Shoou Jinn} and Lu, {Chien Yuan} and Li, {Meng Ju} and Hsu, {Cheng Liang} and Chiou, {Yu Zung} and Hsueh, {Ting Jen} and Chen, {I. Cherng}",

year = "2010",

month = jun,

doi = "10.1016/j.spmi.2010.03.006",

language = "English",

volume = "47",

pages = "772--778",

journal = "Superlattices and Microstructures",

issn = "0749-6036",

publisher = "Academic Press Inc.",

number = "6",

}

TY - JOUR

T1 - A ZnO nanowire-based humidity sensor

AU - Chang, Sheng Po

AU - Chang, Shoou Jinn

AU - Lu, Chien Yuan

AU - Li, Meng Ju

AU - Hsu, Cheng Liang

AU - Chiou, Yu Zung

AU - Hsueh, Ting Jen

AU - Chen, I. Cherng

PY - 2010/6

Y1 - 2010/6

N2 - In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80°C, it was found that measured resistances were 5.9×105, 4.3×105, 3.7×105 and 3.2×105Ω when measured with 25%, 50%, 70% and 90% relative humidity, respectively.

AB - In this paper, we report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates. A humidity sensor was then fabricated using the randomly oriented nanowires bridged across two electrodes. By measuring current-voltage characteristics of the fabricated device at 80°C, it was found that measured resistances were 5.9×105, 4.3×105, 3.7×105 and 3.2×105Ω when measured with 25%, 50%, 70% and 90% relative humidity, respectively.

UR - http://www.scopus.com/inward/record.url?scp=77953326011&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77953326011&partnerID=8YFLogxK

U2 - 10.1016/j.spmi.2010.03.006

DO - 10.1016/j.spmi.2010.03.006

M3 - Article

AN - SCOPUS:77953326011

SN - 0749-6036

VL - 47

SP - 772

EP - 778

JO - Superlattices and Microstructures

JF - Superlattices and Microstructures

IS - 6

ER -

A ZnO nanowire-based humidity sensor

摘要

All Science Journal Classification (ASJC) codes

存取文件

其它文件與鏈接

指紋

引用此