TY - JOUR
T1 - Abrasion and dissolution interaction of Al in a phosphoric acid solution
AU - Tsai, Wen Ta
AU - Huang, Tsung Min
N1 - Funding Information:
The authors would like to thank National Science Council of the Republic of China for supporting this study under contract No. NSC88-2216-E006-037.
PY - 2000/12/8
Y1 - 2000/12/8
N2 - By employing a rotating cylinder system, the roles of mechanical abrasion and electrochemical dissolution during Al CMP were studied. Under rotating and abrasive conditions, both the total metal removal rate and the electrochemical dissolution rate of Al in 5 vol.% phosphoric acid+0.5 M citric acid solution (pH 4) increased with an increase in both contact pressure and specimen rotation speed. However, the contribution of electrochemical dissolution to the total removal rate of Al was less than that of mechanical abrasion with a contact force in the range of 0.98-4.90 N. After the abrasive test, metallic Al was present in the solution, indicating that passive film was not the sole material removed under the chemical-mechanical abrasion condition.
AB - By employing a rotating cylinder system, the roles of mechanical abrasion and electrochemical dissolution during Al CMP were studied. Under rotating and abrasive conditions, both the total metal removal rate and the electrochemical dissolution rate of Al in 5 vol.% phosphoric acid+0.5 M citric acid solution (pH 4) increased with an increase in both contact pressure and specimen rotation speed. However, the contribution of electrochemical dissolution to the total removal rate of Al was less than that of mechanical abrasion with a contact force in the range of 0.98-4.90 N. After the abrasive test, metallic Al was present in the solution, indicating that passive film was not the sole material removed under the chemical-mechanical abrasion condition.
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U2 - 10.1016/S0040-6090(00)01405-X
DO - 10.1016/S0040-6090(00)01405-X
M3 - Article
AN - SCOPUS:0034503515
VL - 379
SP - 107
EP - 113
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
IS - 1-2
ER -