Acoustic Microscopy Measurement of Elastic Constants and Mass Density

Yung Chun Lee, Jin O. Kim, Jan D. Achenbach

研究成果: Article同行評審

63 引文 斯高帕斯(Scopus)

摘要

A method is presented to determine the elastic constants and the mass density of isotropic and anisotropic solids and anisotropic thin films. The velocity and attenuation of leaky surface acoustic waves (SAWs) have been obtained for specified propagation directions from V (z) curves measured by line-focus acoustic microscopy (LFAM). The experimentally obtained velocities have been compared to velocities obtained from a measurement model for the V (z) curve which simulates the experiment. Since the measured and simulated V (z) curves have the same systemic errors, the material constants are free of such errors. For an isotropic solid, Young's modulus E, the shear modulus G and the mass density p have been determined from the leaky Rayleigh wave velocity and attenuation, measured by LFAM, and a longitudinal wave velocity measured by a pulse-echo transit-time technique. For a cubic-crystalline solid, the ratios of the elastic constants to the mass density (Cll / p, c12 / p, c44 / p) have been determined from the directional variation of measured SAW velocities, using a preliminary estimate of p. The mass density p has subsequently been determined by additionally using the attenuation of leaky SAWs in crystal symmetry directions. For a cubic-crystalline thin film deposited on a substrate, the elastic constants and the mass density (c11 c12 C44, p) of the film have been determined from the directional variation of the measured SAW velocities, and a comparison of the corresponding attenuation coefficient with the measured attenuation coefficient has been used to verify the results. 0885-3010/95$04.00

原文English
頁(從 - 到)253-264
頁數12
期刊IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
42
發行號2
DOIs
出版狀態Published - 1995 三月

All Science Journal Classification (ASJC) codes

  • 儀器
  • 聲學與超音波
  • 電氣與電子工程

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