Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab.

Chia-Yen Lee, C. M. Wu

研究成果: Conference contribution

原文English
主出版物標題2019 IEEE 15th International Conference on Automation Science and Engineering (CASE)
出版地Vancouver, BC, Canada
出版狀態Published - 2019

引用此文

Lee, C-Y., & Wu, C. M. (2019). Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab.2019 IEEE 15th International Conference on Automation Science and Engineering (CASE) Vancouver, BC, Canada.
Lee, Chia-Yen ; Wu, C. M. / Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab. 2019 IEEE 15th International Conference on Automation Science and Engineering (CASE). Vancouver, BC, Canada, 2019.
@inproceedings{5977b9f7552a4d528ca11175eb4946a4,
title = "Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab.",
author = "Chia-Yen Lee and Wu, {C. M.}",
year = "2019",
language = "English",
booktitle = "2019 IEEE 15th International Conference on Automation Science and Engineering (CASE)",

}

Lee, C-Y & Wu, CM 2019, Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab.2019 IEEE 15th International Conference on Automation Science and Engineering (CASE). Vancouver, BC, Canada.

Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab. / Lee, Chia-Yen; Wu, C. M.

2019 IEEE 15th International Conference on Automation Science and Engineering (CASE). Vancouver, BC, Canada, 2019.

研究成果: Conference contribution

TY - GEN

T1 - Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab.

AU - Lee, Chia-Yen

AU - Wu, C. M.

PY - 2019

Y1 - 2019

M3 - Conference contribution

BT - 2019 IEEE 15th International Conference on Automation Science and Engineering (CASE)

CY - Vancouver, BC, Canada

ER -

Lee C-Y, Wu CM. Adaptive Genetic Algorithm for Lithography Scheduling in Semiconductor DRAM Fab. 於 2019 IEEE 15th International Conference on Automation Science and Engineering (CASE). Vancouver, BC, Canada. 2019