摘要
An advanced process control (APC) system, an APC method, and a computer program product, which, when executed, performs an APC method are provided for incorporating virtual metrology (VM) into APC. The present inventions uses a reliance index (RI) and a global similarity index (GSI) to adjust at least one controller gain of a run-to-run (R2R) controller when the VM value of a workpiece is adopted to replace the actual measurement value of the workpiece. The RI is used for gauging the reliability of the VM value,
| 貢獻的翻譯標題 | 應用具信心指標之虛擬量測的先進製程控制機制 |
|---|---|
| 原文 | English |
| 專利號 | 8688256 |
| 出版狀態 | Published - 2012 2月 2 |