ADVANCED PROCESS CONTROL SYSTEM AND METHOD UTILIZING VIRTUAL METROLOGY WITH RELIANCE INDEX

Fan-Tien Cheng

ADVANCED PROCESS CONTROL SYSTEM AND METHOD UTILIZING VIRTUAL METROLOGY WITH RELIANCE INDEX

貢獻的翻譯標題: 應用具信心指標之虛擬量測的先進製程控制機制

Fan-Tien Cheng (Inventor)

製造資訊與系統研究所

研究成果: Patent

摘要

Advanced process control (APC) of merging the best measurement (VM) in the APC system, APC method, and computer program product for performing the method is provided when running APC. The present invention runs the VM value of the work-piece is to be adopted as a replacement for the actual measured value of the workpiece-to-run (R2R) at least dependent index (RI) and a global similarity index to adjust a control gain of the controller ( It uses GSI). RI use is used to measure the reliability of the VM value, GSI is to evaluate the similarity degree between all sets of process data of the history of process data to which the sets and used to make the speculative model for generating the virtual VM value do.

貢獻的翻譯標題	應用具信心指標之虛擬量測的先進製程控制機制
原文	English
專利號	10-1335896
出版狀態	Published - 2012 二月 10

指紋深入研究「應用具信心指標之虛擬量測的先進製程控制機制」主題。共同形成了獨特的指紋。

引用此

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AB - Advanced process control (APC) of merging the best measurement (VM) in the APC system, APC method, and computer program product for performing the method is provided when running APC. The present invention runs the VM value of the work-piece is to be adopted as a replacement for the actual measured value of the workpiece-to-run (R2R) at least dependent index (RI) and a global similarity index to adjust a control gain of the controller ( It uses GSI). RI use is used to measure the reliability of the VM value, GSI is to evaluate the similarity degree between all sets of process data of the history of process data to which the sets and used to make the speculative model for generating the virtual VM value do.

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