Ammonia Sensing Characteristics of a Tungsten Trioxide Thin-Film-Based Sensor

Tzu Chieh Chou, Ching Hong Chang, Cheng Lee, Wen Chau Liu

研究成果: Article

2 引文 (Scopus)

摘要

A tungsten trioxide (WO3) thin-film-based ammonia sensor device prepared using radio frequency sputtering is reported and studied. A very thin WO3 film (10 nm) is employed in the studied device. Experimentally, the studied device exhibits a high ammonia sensing response of 13.7 (at 1000-ppm NH3/air, 250 °C), an extremely low detection level (≤10-ppb NH3/air, 250 °C), a relatively low optimal operating temperature of 250 °C, and a widespread sensing concentration range. Furthermore, the device shows advantages including a simple structure, easy fabrication, and relatively lower operating temperature (≤250 °C). Thus, the proposed WO3 thin-film-based sensor device is promising for high-performance ammonia sensing applications.

原文English
文章編號8556505
頁(從 - 到)696-701
頁數6
期刊IEEE Transactions on Electron Devices
66
發行號1
DOIs
出版狀態Published - 2019 一月

指紋

Ammonia
Tungsten
Thin films
Sensors
Air
Sputtering
Fabrication
Temperature
tungsten oxide

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

引用此文

Chou, Tzu Chieh ; Chang, Ching Hong ; Lee, Cheng ; Liu, Wen Chau. / Ammonia Sensing Characteristics of a Tungsten Trioxide Thin-Film-Based Sensor. 於: IEEE Transactions on Electron Devices. 2019 ; 卷 66, 編號 1. 頁 696-701.
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Ammonia Sensing Characteristics of a Tungsten Trioxide Thin-Film-Based Sensor. / Chou, Tzu Chieh; Chang, Ching Hong; Lee, Cheng; Liu, Wen Chau.

於: IEEE Transactions on Electron Devices, 卷 66, 編號 1, 8556505, 01.2019, p. 696-701.

研究成果: Article

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