Amorphous InGaZnO Ultraviolet Phototransistors with a Thin Ga2O3 Layer

Shoou Jinn Chang, T. H. Chang, W. Y. Weng, C. J. Chiu, S. P. Chang

研究成果: Article同行評審

10 引文 斯高帕斯(Scopus)

摘要

The authors report the fabrication of amorphous IGZO (a-IGZO) phototransistors with a thin Ga2O3 layer. It was found that the performances of the phototransistors depend strongly on the oxygen partial pressure during the deposition of the Ga2O3 layer. It was also found that the fabricated devices exhibited good electrical properties with electron mobility (μFE) of 13.2 cm2/V·s, subthreshold swing (SS) of 0.13 V/decade, and ON/OFF current ratio > 5 × 105. Furthermore, it was found that two cutoffs exist in the devices prepared with 25% oxygen partial pressure. The deep-ultraviolet (UV)-to-visible rejection ratio and near-UV-to-visible rejection ratio of the fabricated phototransistors were 104 and 20, respectively.

原文English
文章編號6832459
頁(從 - 到)125-129
頁數5
期刊IEEE Journal of Selected Topics in Quantum Electronics
20
發行號6
DOIs
出版狀態Published - 2014 十一月 1

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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