@article{8af835ffd3394b5ab4e6ac0a621f5b5f,
title = "Amorphous metallic alloys: A new advance in thin-film diffusion barriers for copper metallization",
author = "E. Kolawa and Reid, \{J. S.\} and Chen, \{J. S.\}",
note = "Funding Information: The financial support of the U.S. Army Research Office is gratefully acknowledged. The authors thank Rob Gorris for technical assistance and Rachael Sampley for manuscript preparation. Funding Information: The financial support ofthe U.S. Army Research Office is gratefully acknowledged. The authors thank Rob Gorris for technical assistance and Rachael Sampley for manuscript preparation.; Submicrometer Metallization: Challenges, Opportunities, and Limitations 1992 ; Conference date: 20-09-1992 Through 25-09-1992",
year = "1993",
month = may,
day = "21",
doi = "10.1117/12.145460",
language = "English",
volume = "1805",
pages = "11--17",
journal = "Proceedings of SPIE - The International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE",
}