Amorphous TiO2-based thin-film phototransistor

Han Yin Liu, Ruei Chin Huang, Yi Ying Li, Ching Sung Lee, Wei-Chou Hsu

研究成果: Article

3 引文 (Scopus)

摘要

This letter presents amorphous TiO2-based thin-film phototransistors whose structures are designed for front-side and back-side illumination. The channel and gate dielectric layers are deposited by ultrasonic spray pyrolysisdeposition,which is a non-vacuum, cost-effective, thin-film deposition technique similar to chemical vapor deposition. The material structure, chemical composition, and optical characteristics of the amorphous TiO2 thin film are analyzed. The phototransistor shows the typical current-voltage (I-V) characteristics of field-effect transistors. It demonstrates a UV-to-visible rejection ratio of approximately 70 -80, a high responsivity of 13.64 A/W, and a high detectivity of 1.64 × 1012 Jones. The phototransistor can be operated in the high-photo-responsivity and highdetectivitymodes by biasing at different quiescent points.

原文English
文章編號7898432
頁(從 - 到)756-759
頁數4
期刊IEEE Electron Device Letters
38
發行號6
DOIs
出版狀態Published - 2017 六月 1

指紋

Phototransistors
Thin films
Gate dielectrics
Amorphous films
Field effect transistors
Chemical vapor deposition
Lighting
Ultrasonics
Electric potential
Chemical analysis
Costs

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

引用此文

Liu, H. Y., Huang, R. C., Li, Y. Y., Lee, C. S., & Hsu, W-C. (2017). Amorphous TiO2-based thin-film phototransistor. IEEE Electron Device Letters, 38(6), 756-759. [7898432]. https://doi.org/10.1109/LED.2017.2694001
Liu, Han Yin ; Huang, Ruei Chin ; Li, Yi Ying ; Lee, Ching Sung ; Hsu, Wei-Chou. / Amorphous TiO2-based thin-film phototransistor. 於: IEEE Electron Device Letters. 2017 ; 卷 38, 編號 6. 頁 756-759.
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Liu, HY, Huang, RC, Li, YY, Lee, CS & Hsu, W-C 2017, 'Amorphous TiO2-based thin-film phototransistor', IEEE Electron Device Letters, 卷 38, 編號 6, 7898432, 頁 756-759. https://doi.org/10.1109/LED.2017.2694001

Amorphous TiO2-based thin-film phototransistor. / Liu, Han Yin; Huang, Ruei Chin; Li, Yi Ying; Lee, Ching Sung; Hsu, Wei-Chou.

於: IEEE Electron Device Letters, 卷 38, 編號 6, 7898432, 01.06.2017, p. 756-759.

研究成果: Article

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