An Algorithm of Multi-Subpopulation Parameters with Hybrid Estimation of Distribution for Semiconductor Scheduling with Constrained Waiting Time

Hung Kai Wang, Chen Fu Chien, Mitsuo Gen

研究成果: Article同行評審

25 引文 斯高帕斯(Scopus)

摘要

Scheduling for wafer fabrication of advanced technology nodes entails complicated constraints such as limited waiting times. Focusing on real settings, this paper aims to develop a novel genetic algorithm of multi-subpopulation parameters with hybrid estimation of distribution (MSPHEDA) to solve the present problem effectively and efficiently. To estimate the validity of this approach, ten scenarios were simulated on the basis of empirical data as the basis to compare the performance of MSPHEDA and other heuristic methods for minimizing makespan and reducing the total exceeded limited waiting time. The results have shown practical viability of the proposed approach.

原文English
文章編號7114308
頁(從 - 到)353-366
頁數14
期刊IEEE Transactions on Semiconductor Manufacturing
28
發行號3
DOIs
出版狀態Published - 2015 八月 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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