An automated demolding system for PDMS microstructures with high aspect ratio

Wenjie Chen, Chih Hsing Liu

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

This paper presents a roller-based peel-off demolding method and system for demolding of the polydimethylsiloxane (PDMS) micro pillars with high aspect ratio (6:1). The method can reduce the maximum stress exerted on the microstructures during the step of separating the PDMS film from the mold. Therefore the yield rate can be greatly increased. In this paper, the peel-off demolding process has been analyzed, and the major failure mode of the process is identified as the lateral collapse of the micro pillars. The effects of several process parameters (such as cycle time, sample thickness and temperature) on yield rate are identified. A lower demolding speed, larger thickness and lower temperature of the sample can yield better results. A prototype of the automated demolding system has been developed. The experimental results show that the system can achieve stable results with 99% yield rate.

原文English
主出版物標題2014 13th International Conference on Control Automation Robotics and Vision, ICARCV 2014
發行者Institute of Electrical and Electronics Engineers Inc.
頁面1201-1206
頁數6
ISBN(電子)9781479951994
DOIs
出版狀態Published - 2014 一月 1
事件2014 13th International Conference on Control Automation Robotics and Vision, ICARCV 2014 - Singapore, Singapore
持續時間: 2014 十二月 102014 十二月 12

出版系列

名字2014 13th International Conference on Control Automation Robotics and Vision, ICARCV 2014

Other

Other2014 13th International Conference on Control Automation Robotics and Vision, ICARCV 2014
國家Singapore
城市Singapore
期間14-12-1014-12-12

All Science Journal Classification (ASJC) codes

  • Computer Vision and Pattern Recognition
  • Human-Computer Interaction
  • Artificial Intelligence
  • Control and Systems Engineering

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