An inverse problem of estimating the Biot number in deep X-ray lithography

W. J. Chang, W. L. Chen, Y. C. Yang, H. L. Lee

研究成果: Article同行評審

3 引文 斯高帕斯(Scopus)

摘要

In this study, an inverse algorithm based on the conjugate gradient method and the discrepancy principle is applied to estimate the unknown space- and time-dependent Biot number in deep X-ray lithography using temperature measurements. It is assumed that no prior information is available on the functional form of the unknown Biot number; hence, the procedure is classified as the function estimation in the inverse calculation. The accuracy of the inverse analysis is examined by using simulated exact and inexact temperature measurements. Results show that an excellent estimation of the space- and time-dependent Biot number can be obtained for the test case considered in this study.

原文English
頁(從 - 到)155-162
頁數8
期刊Applied Physics B: Lasers and Optics
90
發行號1
DOIs
出版狀態Published - 2008 一月 1

All Science Journal Classification (ASJC) codes

  • 物理與天文學(雜項)
  • 物理與天文學 (全部)

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