An investigation of the microstructure, optical and electrical properties of ZITO thin film using the sol-gel method

K. J. Chen, F. Y. Hung, S. J. Chang, S. J. Young, Z. S. Hu, S. P. Chang

研究成果: Article

13 引文 (Scopus)

摘要

The multi-compound ZITO transparent conductive oxide (TCO) thin films were synthesized using the sol-gel method. The ZITO thin films with various volume ratios of ZnO to ITO (1:1, 2:1 and 9:1) were crystallized at different temperatures (600-700 °C). The results showed that the crystalline characteristics and optical transmittance were mainly dependent on ITO content and crystallization. Notably, the 650 °C Z9ITO film not only had better conductivity but also possessed excellent optical transmittance. In addition, the surface roughness of the ZITO films and optoelectric properties of IZO (indium doped ZnO) films were analyzed to confirm the contribution of indium dopants on the optical transmittance. Also, the ZITO films were subjected to the effects of indium and tin dopants and this improved the related characteristics of ZnO films.

原文English
頁(從 - 到)347-354
頁數8
期刊Journal of Sol-Gel Science and Technology
54
發行號3
DOIs
出版狀態Published - 2010 六月 1

指紋

Sol-gel process
Electric properties
Optical properties
electrical properties
Indium
gels
Opacity
optical properties
Thin films
microstructure
Microstructure
indium
thin films
transmittance
ITO (semiconductors)
Doping (additives)
Tin
Crystallization
Oxide films
tin

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Chemistry(all)
  • Biomaterials
  • Condensed Matter Physics
  • Materials Chemistry

引用此文

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abstract = "The multi-compound ZITO transparent conductive oxide (TCO) thin films were synthesized using the sol-gel method. The ZITO thin films with various volume ratios of ZnO to ITO (1:1, 2:1 and 9:1) were crystallized at different temperatures (600-700 °C). The results showed that the crystalline characteristics and optical transmittance were mainly dependent on ITO content and crystallization. Notably, the 650 °C Z9ITO film not only had better conductivity but also possessed excellent optical transmittance. In addition, the surface roughness of the ZITO films and optoelectric properties of IZO (indium doped ZnO) films were analyzed to confirm the contribution of indium dopants on the optical transmittance. Also, the ZITO films were subjected to the effects of indium and tin dopants and this improved the related characteristics of ZnO films.",
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T1 - An investigation of the microstructure, optical and electrical properties of ZITO thin film using the sol-gel method

AU - Chen, K. J.

AU - Hung, F. Y.

AU - Chang, S. J.

AU - Young, S. J.

AU - Hu, Z. S.

AU - Chang, S. P.

PY - 2010/6/1

Y1 - 2010/6/1

N2 - The multi-compound ZITO transparent conductive oxide (TCO) thin films were synthesized using the sol-gel method. The ZITO thin films with various volume ratios of ZnO to ITO (1:1, 2:1 and 9:1) were crystallized at different temperatures (600-700 °C). The results showed that the crystalline characteristics and optical transmittance were mainly dependent on ITO content and crystallization. Notably, the 650 °C Z9ITO film not only had better conductivity but also possessed excellent optical transmittance. In addition, the surface roughness of the ZITO films and optoelectric properties of IZO (indium doped ZnO) films were analyzed to confirm the contribution of indium dopants on the optical transmittance. Also, the ZITO films were subjected to the effects of indium and tin dopants and this improved the related characteristics of ZnO films.

AB - The multi-compound ZITO transparent conductive oxide (TCO) thin films were synthesized using the sol-gel method. The ZITO thin films with various volume ratios of ZnO to ITO (1:1, 2:1 and 9:1) were crystallized at different temperatures (600-700 °C). The results showed that the crystalline characteristics and optical transmittance were mainly dependent on ITO content and crystallization. Notably, the 650 °C Z9ITO film not only had better conductivity but also possessed excellent optical transmittance. In addition, the surface roughness of the ZITO films and optoelectric properties of IZO (indium doped ZnO) films were analyzed to confirm the contribution of indium dopants on the optical transmittance. Also, the ZITO films were subjected to the effects of indium and tin dopants and this improved the related characteristics of ZnO films.

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