An investigation of the microstructure, optical and electrical properties of ZITO thin film using the sol-gel method

K. J. Chen; F. Y. Hung; S. J. Chang; S. J. Young; Z. S. Hu; S. P. Chang

doi:10.1007/s10971-010-2202-0

An investigation of the microstructure, optical and electrical properties of ZITO thin film using the sol-gel method

K. J. Chen, F. Y. Hung, S. J. Chang, S. J. Young, Z. S. Hu, S. P. Chang

研究成果: Article › 同行評審

14 引文斯高帕斯（Scopus）

摘要

The multi-compound ZITO transparent conductive oxide (TCO) thin films were synthesized using the sol-gel method. The ZITO thin films with various volume ratios of ZnO to ITO (1:1, 2:1 and 9:1) were crystallized at different temperatures (600-700 °C). The results showed that the crystalline characteristics and optical transmittance were mainly dependent on ITO content and crystallization. Notably, the 650 °C Z₉ITO film not only had better conductivity but also possessed excellent optical transmittance. In addition, the surface roughness of the ZITO films and optoelectric properties of IZO (indium doped ZnO) films were analyzed to confirm the contribution of indium dopants on the optical transmittance. Also, the ZITO films were subjected to the effects of indium and tin dopants and this improved the related characteristics of ZnO films.

原文	English
頁（從 - 到）	347-354
頁數	8
期刊	Journal of Sol-Gel Science and Technology
卷	54
發行號	3
DOIs	https://doi.org/10.1007/s10971-010-2202-0
出版狀態	Published - 2010 6月

All Science Journal Classification (ASJC) codes

電子、光磁材料
陶瓷和複合材料
一般化學
生物材料
凝聚態物理學
材料化學

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title = "An investigation of the microstructure, optical and electrical properties of ZITO thin film using the sol-gel method",

abstract = "The multi-compound ZITO transparent conductive oxide (TCO) thin films were synthesized using the sol-gel method. The ZITO thin films with various volume ratios of ZnO to ITO (1:1, 2:1 and 9:1) were crystallized at different temperatures (600-700 °C). The results showed that the crystalline characteristics and optical transmittance were mainly dependent on ITO content and crystallization. Notably, the 650 °C Z9ITO film not only had better conductivity but also possessed excellent optical transmittance. In addition, the surface roughness of the ZITO films and optoelectric properties of IZO (indium doped ZnO) films were analyzed to confirm the contribution of indium dopants on the optical transmittance. Also, the ZITO films were subjected to the effects of indium and tin dopants and this improved the related characteristics of ZnO films.",

author = "Chen, {K. J.} and Hung, {F. Y.} and Chang, {S. J.} and Young, {S. J.} and Hu, {Z. S.} and Chang, {S. P.}",

note = "Funding Information: Acknowledgments The authors are grateful to National Cheng Kung University, the Center for Micro/Nano Science and Technology (D98-2700) and NSC 98-2221-E-006-068; NSC 98-2622-E-006-024-CC3 for the financial support.",

year = "2010",

month = jun,

doi = "10.1007/s10971-010-2202-0",

language = "English",

volume = "54",

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T1 - An investigation of the microstructure, optical and electrical properties of ZITO thin film using the sol-gel method

AU - Chen, K. J.

AU - Hung, F. Y.

AU - Chang, S. J.

AU - Young, S. J.

AU - Hu, Z. S.

AU - Chang, S. P.

N1 - Funding Information: Acknowledgments The authors are grateful to National Cheng Kung University, the Center for Micro/Nano Science and Technology (D98-2700) and NSC 98-2221-E-006-068; NSC 98-2622-E-006-024-CC3 for the financial support.

PY - 2010/6

Y1 - 2010/6

N2 - The multi-compound ZITO transparent conductive oxide (TCO) thin films were synthesized using the sol-gel method. The ZITO thin films with various volume ratios of ZnO to ITO (1:1, 2:1 and 9:1) were crystallized at different temperatures (600-700 °C). The results showed that the crystalline characteristics and optical transmittance were mainly dependent on ITO content and crystallization. Notably, the 650 °C Z9ITO film not only had better conductivity but also possessed excellent optical transmittance. In addition, the surface roughness of the ZITO films and optoelectric properties of IZO (indium doped ZnO) films were analyzed to confirm the contribution of indium dopants on the optical transmittance. Also, the ZITO films were subjected to the effects of indium and tin dopants and this improved the related characteristics of ZnO films.

AB - The multi-compound ZITO transparent conductive oxide (TCO) thin films were synthesized using the sol-gel method. The ZITO thin films with various volume ratios of ZnO to ITO (1:1, 2:1 and 9:1) were crystallized at different temperatures (600-700 °C). The results showed that the crystalline characteristics and optical transmittance were mainly dependent on ITO content and crystallization. Notably, the 650 °C Z9ITO film not only had better conductivity but also possessed excellent optical transmittance. In addition, the surface roughness of the ZITO films and optoelectric properties of IZO (indium doped ZnO) films were analyzed to confirm the contribution of indium dopants on the optical transmittance. Also, the ZITO films were subjected to the effects of indium and tin dopants and this improved the related characteristics of ZnO films.

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An investigation of the microstructure, optical and electrical properties of ZITO thin film using the sol-gel method

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