An investigation of the microstructure, optical and electrical properties of ZITO thin film using the sol-gel method

K. J. Chen, F. Y. Hung, S. J. Chang, S. J. Young, Z. S. Hu, S. P. Chang

研究成果: Article同行評審

13 引文 斯高帕斯(Scopus)

摘要

The multi-compound ZITO transparent conductive oxide (TCO) thin films were synthesized using the sol-gel method. The ZITO thin films with various volume ratios of ZnO to ITO (1:1, 2:1 and 9:1) were crystallized at different temperatures (600-700 °C). The results showed that the crystalline characteristics and optical transmittance were mainly dependent on ITO content and crystallization. Notably, the 650 °C Z9ITO film not only had better conductivity but also possessed excellent optical transmittance. In addition, the surface roughness of the ZITO films and optoelectric properties of IZO (indium doped ZnO) films were analyzed to confirm the contribution of indium dopants on the optical transmittance. Also, the ZITO films were subjected to the effects of indium and tin dopants and this improved the related characteristics of ZnO films.

原文English
頁(從 - 到)347-354
頁數8
期刊Journal of Sol-Gel Science and Technology
54
發行號3
DOIs
出版狀態Published - 2010 六月

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 陶瓷和複合材料
  • 化學 (全部)
  • 生物材料
  • 凝聚態物理學
  • 材料化學

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