An optical sensor for measuring the position and slanting direction of flat surfaces

Yu Ta Chen, Yen Sheng Huang, Chien Sheng Liu

研究成果: Article同行評審

9 引文 斯高帕斯(Scopus)

摘要

Automated optical inspection is a very important technique. For this reason, this study proposes an optical non-contact slanting surface measuring system. The essential features of the measurement system are obtained through simulations using the optical design software Zemax. The actual propagation of laser beams within the measurement system is traced by using a homogeneous transformation matrix (HTM), the skew-ray tracing method, and a first-order Taylor series expansion. Additionally, a complete mathematical model that describes the variations in light spots on photoelectric sensors and the corresponding changes in the sample orientation and distance was established. Finally, a laboratory prototype system was constructed on an optical bench to verify experimentally the proposed system. This measurement system can simultaneously detect the slanting angles (x, z) in the x and z directions of the sample and the distance (y) between the biconvex lens and the flat sample surface.

原文English
文章編號1061
期刊Sensors (Switzerland)
16
發行號7
DOIs
出版狀態Published - 2016 七月 9

All Science Journal Classification (ASJC) codes

  • 分析化學
  • 生物化學
  • 原子與分子物理與光學
  • 儀器
  • 電氣與電子工程

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