Analysis and design of full-bridge LC parallel resonant plasma driver with variable-inductor based phase control

Ray Lee Lin, Min Han Lee

研究成果: Conference contribution

4 引文 斯高帕斯(Scopus)

摘要

This paper presents the analysis and design of the full-bridge (FB) LC parallel resonant plasma driver at the radio-frequency (RF) operation with variable-inductor based phase control scheme. Since the switching frequency of the RF plasma module is mainly fixed at 13.56MHz for EMC regulation, the variable-inductor control scheme can adjust the transconductance amplitude to enable load-current regulation. Additionally, in order to have minimal conduction loss on the switches, the design criterion of the required dead-time for ZVS condition with the minimal circulating current of the LC parallel resonant tank is required. Based on the equivalent circuit models of the RF plasma module described prior work, the analysis and design of the driver for the RF plasma module are presented. Finally, by using the SIMPLIS® simulation software, the FB LC parallel resonant plasma driver with the variable-inductor based phase control is simulated to validate the achievement of required functions. Furthermore, the dead-times and lagging phases are obtained from the simulation results, which are compared with the calculated results to validate the feasibility of design criterion.

原文English
主出版物標題Proceedings - IECON 2010, 36th Annual Conference of the IEEE Industrial Electronics Society
頁面77-82
頁數6
DOIs
出版狀態Published - 2010 十二月 1
事件36th Annual Conference of the IEEE Industrial Electronics Society, IECON 2010 - Glendale, AZ, United States
持續時間: 2010 十一月 72010 十一月 10

出版系列

名字IECON Proceedings (Industrial Electronics Conference)

Other

Other36th Annual Conference of the IEEE Industrial Electronics Society, IECON 2010
國家/地區United States
城市Glendale, AZ
期間10-11-0710-11-10

All Science Journal Classification (ASJC) codes

  • 控制與系統工程
  • 電氣與電子工程

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