Analysis of aromatic volatiles utilizing a MEMS-based gas chromatography column

Yu Hao Su, Chia Yen Lee, Ruey Jen Yang

研究成果: Conference contribution

摘要

The purpose of this study is to propose and apply a MEMS-based gas chromatography (GC) device comprising a miniature serpentine column. A 2 m long, 200 μm wide and 250 μm deep column was fabricated using a wet etching process and bonded to a Pyrex cover plate. After the GC column was coated with Carbowax 20M as the stationary phase, the concentrations of benzene, toluene, Ethylbenzene and m-Xylene were successfully detected in the mixed sample. The leakage test and mixed gas separation test achieved a useful separation result for Ethylbenzene-Xylene and Benzene-Toluen mixture at a 17.1 cm/s linear flow rate in a GC chip column.

原文English
主出版物標題Manufacturing Science and Technology
頁面2642-2646
頁數5
DOIs
出版狀態Published - 2011
事件2011 International Conference on Advanced Engineering Materials and Technology, AEMT 2011 - Sanya, China
持續時間: 2011 七月 292011 七月 31

出版系列

名字Advanced Materials Research
295-297
ISSN(列印)1022-6680

Other

Other2011 International Conference on Advanced Engineering Materials and Technology, AEMT 2011
國家/地區China
城市Sanya
期間11-07-2911-07-31

All Science Journal Classification (ASJC) codes

  • 工程 (全部)

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