Analysis of fluidic and mechanical motion in MEMS by using high speed X-ray micro-imaging techniques

Tzong-Shyng Leu, Ann Marie Lanzillotto, Michael Amabile, Richard Wildes

研究成果: Paper同行評審

6 引文 斯高帕斯(Scopus)

摘要

In this abstract, we describe studies of micro structure and micro motion in several microsystems using unique high speed x-ray imaging techniques. By way of illustration, we have imaged and measured steady state flow in micro pipes of various shapes and sizes using a high frame rate CCD camera. These experimental results were compared with macroscopic flow models. Also, new x-ray stroboscopic techniques have been developed which allow us to image periodic motion up to KHz rates. To demonstrate this new capability, we studied the dynamic response of a micro electromagnetic optical switch. Finally, we have applied x-ray microtomography in an investigation of the internal micro structure of inkjet print heads.

原文English
頁面149-150
頁數2
出版狀態Published - 1997 一月 1
事件Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA
持續時間: 1997 六月 161997 六月 19

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)
城市Chicago, IL, USA
期間97-06-1697-06-19

All Science Journal Classification (ASJC) codes

  • 工程 (全部)

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