Analysis of the growth of RF sputtered ZnO thin films using the optical reflective second harmonic generation

Kuang Yao Lo, Shih Chieh Lo, Sheng Yuan Chu, Ren Chuan Chang, Chang Feng Yu

研究成果: Article同行評審

5 引文 斯高帕斯(Scopus)

摘要

Reflective second harmonic generation (RSHG) is used to analyze the growth condition of poly crystal zinc oxide (ZnO) film with a c-axis orientation, grown on the Si substrate by RF magnetron sputtering technique. It elucidates physical phenomena exhibited by growing ZnO thin films. Connecting with analytical results of the characteristic parameters derived from the X-ray patterns and SEM images, the relationship between the RSHG intensity and the substrate temperature reveals that the effect of the grain boundaries is the domination of the RSHG mechanism. The inclined structures of ZnO films on the Si substrate are explained with reference to these RSHG patterns.

原文English
頁(從 - 到)532-538
頁數7
期刊Journal of Crystal Growth
290
發行號2
DOIs
出版狀態Published - 2006 五月 1

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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