Amorphous carbon films containing magnetic nanograins of pure Fe 3C phase were fabricated using dc magnetron co-sputtering system. The crystallinity and the size of Fe3C grains were improved from the as-deposited films by annealing. A grain size of 18 nm was obtained at the annealing temperature of 550°C.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)