摘要
Amorphous carbon films containing magnetic nanograins of pure Fe 3C phase were fabricated using dc magnetron co-sputtering system. The crystallinity and the size of Fe3C grains were improved from the as-deposited films by annealing. A grain size of 18 nm was obtained at the annealing temperature of 550°C.
原文 | English |
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頁(從 - 到) | 1975-1978 |
頁數 | 4 |
期刊 | Journal of Applied Physics |
卷 | 94 |
發行號 | 3 |
DOIs | |
出版狀態 | Published - 2003 八月 1 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)