Angular vertical comb-driven tunable capacitor with high-tuning capabilities

Hung D. Nguyen, Dooyoung Hah, Pamela R. Patterson, Rumin Chao, Wibool Piyawattanametha, Erwin K. Lau, Ming C. Wu

研究成果: Article

55 引文 (Scopus)

摘要

This paper reports on a novel tunable capacitor with electrostatic angular vertical comb-drive (AVC) actuators. The AVC tunable capacitor creates a large offset in comb fingers through a small rotation angle - an advantage not found in conventional lateral comb-drive devices. High capacitance and large continuous tuning ratio is achieved in a compact device area. The largest tuning varactor demonstrates capacitance values between 0.27-8.6 pF - a tuning ratio of more than 31:1, the highest ever reported. The maximum quality factor Q is 273 at 1 GHz near the minimum capacitance value.

原文English
頁(從 - 到)406-413
頁數8
期刊Journal of Microelectromechanical Systems
13
發行號3
DOIs
出版狀態Published - 2004 六月 1

指紋

Capacitors
Capacitance
Tuning
Varactors
Electrostatics
Actuators

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

引用此文

Nguyen, H. D., Hah, D., Patterson, P. R., Chao, R., Piyawattanametha, W., Lau, E. K., & Wu, M. C. (2004). Angular vertical comb-driven tunable capacitor with high-tuning capabilities. Journal of Microelectromechanical Systems, 13(3), 406-413. https://doi.org/10.1109/JMEMS.2004.828741
Nguyen, Hung D. ; Hah, Dooyoung ; Patterson, Pamela R. ; Chao, Rumin ; Piyawattanametha, Wibool ; Lau, Erwin K. ; Wu, Ming C. / Angular vertical comb-driven tunable capacitor with high-tuning capabilities. 於: Journal of Microelectromechanical Systems. 2004 ; 卷 13, 編號 3. 頁 406-413.
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abstract = "This paper reports on a novel tunable capacitor with electrostatic angular vertical comb-drive (AVC) actuators. The AVC tunable capacitor creates a large offset in comb fingers through a small rotation angle - an advantage not found in conventional lateral comb-drive devices. High capacitance and large continuous tuning ratio is achieved in a compact device area. The largest tuning varactor demonstrates capacitance values between 0.27-8.6 pF - a tuning ratio of more than 31:1, the highest ever reported. The maximum quality factor Q is 273 at 1 GHz near the minimum capacitance value.",
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Nguyen, HD, Hah, D, Patterson, PR, Chao, R, Piyawattanametha, W, Lau, EK & Wu, MC 2004, 'Angular vertical comb-driven tunable capacitor with high-tuning capabilities', Journal of Microelectromechanical Systems, 卷 13, 編號 3, 頁 406-413. https://doi.org/10.1109/JMEMS.2004.828741

Angular vertical comb-driven tunable capacitor with high-tuning capabilities. / Nguyen, Hung D.; Hah, Dooyoung; Patterson, Pamela R.; Chao, Rumin; Piyawattanametha, Wibool; Lau, Erwin K.; Wu, Ming C.

於: Journal of Microelectromechanical Systems, 卷 13, 編號 3, 01.06.2004, p. 406-413.

研究成果: Article

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AB - This paper reports on a novel tunable capacitor with electrostatic angular vertical comb-drive (AVC) actuators. The AVC tunable capacitor creates a large offset in comb fingers through a small rotation angle - an advantage not found in conventional lateral comb-drive devices. High capacitance and large continuous tuning ratio is achieved in a compact device area. The largest tuning varactor demonstrates capacitance values between 0.27-8.6 pF - a tuning ratio of more than 31:1, the highest ever reported. The maximum quality factor Q is 273 at 1 GHz near the minimum capacitance value.

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