Anti-reflection nano-structures fabricated on curved surface of glass lens based on metal contact printing lithography

Wei Xiang Su, Chun Yin Wu, Yung Chun Lee

研究成果: Article同行評審

18 引文 斯高帕斯(Scopus)

摘要

This paper reports the fabrication of subwavelength nano-structures on the curved surface of a glass lens for the purposes of anti-reflection. It utilizes a flexible PDMS mold to transfer metallic patterns to the lens surface which is pre-coated with a polymer layer. Using the transferred metal pattern as an etching mask, nano-structures are directly fabricated on the lens surface by plasma dry-etching processes. A plano/convex lens made of BK-7 glass with a lens diameter of 12.7 mm and a radius of curvature of 25.8 mm is used in this paper. Hexagonally arrayed nano-structures with a truncated conical profile, a center-to-center pitch of 300 nm, and a maximum structure height of 290 nm are experimentally achieved. Measurement results show the optical transmittance is increased by about 2.4% in average for wavelength within visible light spectrum. The directly fabricated nano-structures also exhibit good anti-glaring effects and the potentials for further optical applications.

原文English
頁(從 - 到)15-20
頁數6
期刊Microelectronic Engineering
214
DOIs
出版狀態Published - 2019 6月 1

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 原子與分子物理與光學
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 電氣與電子工程

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