Application of quantum well-like thermocouple to thermoelectric energy harvester by BiCMOS process

S. M. Yang, M. Cong, T. Lee

研究成果: Article同行評審

13 引文 斯高帕斯(Scopus)

摘要

This work aims at improving the energy harvester performance by using low-dimensional thermoelectric materials. A micro-thermoelectric generator (μTEG) with quantum well-like thermocouples is developed by state-of-the-art CMOS (Complementary metal-oxide semiconductor) process. A relaxation-time model is applied to analyze the characteristic length of silicon germanium quantum well, and a thermal model is also applied to calculate the thermocouple size for optimal performance by matching the thermal/electrical resistance. Analysis based on TSMC 0.35 μm 3P3M (3-poly and 3-metal layers) BiCMOS process shows that the maximum power factor and voltage factor of a μTEG is 0.241 μW/cm2 K2 and 10.442 V/cm2 K. Design implementation validates that the μTEG with 60 μm × 4 μm quantum well-like thermocouples (0.05 μm Si0.9Ge0.1 quantum well on 0.300 μm P-thermoleg and 0.280 μm N-thermoleg) has the best performance compared with those reported in the literature.

原文English
頁(從 - 到)117-124
頁數8
期刊Sensors and Actuators, A: Physical
166
發行號1
DOIs
出版狀態Published - 2011 三月

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 儀器
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 金屬和合金
  • 電氣與電子工程

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