Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter

I. Tseng Tang, Han Jan Chen, W. C. Hwang, Y. C. Wang, Mau Phon Houng, Yeong Her Wang

研究成果: Article

28 引文 斯高帕斯(Scopus)

摘要

The applications of surface acoustic wave (SAW) devices aim directly at piezoelectric thin films deposited onto amorphous diamond-like carbon (DLC) coated on silicon substrates from target ZnO in this study. Our high-velocity SAW filters are characterized using multi-layer structures of thin films by DLC depositing. However, if propagating velocity of diamond is much higher, then the SAW phase velocity of piezoelectric thin film ZnO deposited on DLC coated onto Si substrate is raised from 2800 to11430m/s. Consequently, the GHz-band SAW devices could be fabricated using thin films of DLC without sub-micron photolithography technology. We have been also successfully fabricated and demonstrated the diamond-like SAW filters by evaporating interdigital transducers on ZnO thin films with ULSI technology.

原文English
頁(從 - 到)461-466
頁數6
期刊Journal of Crystal Growth
262
發行號1-4
DOIs
出版狀態Published - 2004 二月 15

    指紋

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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