Arrayed metallic micro/nano particles for localized surface plasmon resonance based on metal contact transfer lithography

H. Y. Chung, C. Y. Wu, C. H. Chen, Y. C. Lee

研究成果: Conference contribution

摘要

In this study, we demonstrate a rapidly, low cost, and mass production process to fabricate arrayed metallic nanoparticles on a variety of substrates based on contact transfer and metal mask embedded lithography (CMEL). A hexagonal arrayed metallic nanoparticles deployed on ITO/glass substrate with sub-micron periodicity is achieved. It is observed in optical transmittance measurements that noble metallic arrayed nanoparticles deployed on ITO/glass substrate result in a spectrally narrowband of extinction in visible range, and is in good agreement with the simulated results using finite-element method (FEM). It is found that the narrowband extinction spectrum is associated with electromagnetic field coupling between the arrayed metallic nanostructures and the ITO layer. This electromagnetic field coupling induces significant plasmon resonance in the ITO layer underneath the arrayed metallic nanostructures. Based on this observed phenomenon and our innovative large-area nano-fabrication processes, optoelectronic devices with arrayed metallic nanostructures can be easily designed and developed.

原文English
主出版物標題2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
頁面339-342
頁數4
DOIs
出版狀態Published - 2012 六月 1
事件7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan
持續時間: 2012 三月 52012 三月 8

出版系列

名字2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

Other

Other7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
國家Japan
城市Kyoto
期間12-03-0512-03-08

指紋

Surface plasmon resonance
Lithography
ITO glass
Nanostructures
Nanoparticles
Electromagnetic fields
Substrates
Metals
Opacity
Nanotechnology
Optoelectronic devices
Masks
Finite element method
Costs

All Science Journal Classification (ASJC) codes

  • Engineering (miscellaneous)

引用此文

Chung, H. Y., Wu, C. Y., Chen, C. H., & Lee, Y. C. (2012). Arrayed metallic micro/nano particles for localized surface plasmon resonance based on metal contact transfer lithography. 於 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 (頁 339-342). [6196788] (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012). https://doi.org/10.1109/NEMS.2012.6196788
Chung, H. Y. ; Wu, C. Y. ; Chen, C. H. ; Lee, Y. C. / Arrayed metallic micro/nano particles for localized surface plasmon resonance based on metal contact transfer lithography. 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. 頁 339-342 (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012).
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Chung, HY, Wu, CY, Chen, CH & Lee, YC 2012, Arrayed metallic micro/nano particles for localized surface plasmon resonance based on metal contact transfer lithography. 於 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012., 6196788, 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, 頁 339-342, 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, 12-03-05. https://doi.org/10.1109/NEMS.2012.6196788

Arrayed metallic micro/nano particles for localized surface plasmon resonance based on metal contact transfer lithography. / Chung, H. Y.; Wu, C. Y.; Chen, C. H.; Lee, Y. C.

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. p. 339-342 6196788 (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012).

研究成果: Conference contribution

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Chung HY, Wu CY, Chen CH, Lee YC. Arrayed metallic micro/nano particles for localized surface plasmon resonance based on metal contact transfer lithography. 於 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. p. 339-342. 6196788. (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012). https://doi.org/10.1109/NEMS.2012.6196788