Automated extraction of barrier heights for asymmetric MIM tunneling diodes

Wallace Lin, Darsen D. Lu, Yi Xiu Hong, Wei Chou Hsu

研究成果: Article同行評審

摘要

Cowell's method of extracting barrier heights of top and bottom electrode metals in asymmetric metal-insulator-metal (MIM) tunneling diodes exhibiting Fowler-Nordheim tunneling is successfully automated. Pt-Al2O3-TiN MIM diodes with 5 nm insulator thickness are used in demonstration. Conditions assuring successful application of Cowell's method and its automation are discussed.

原文English
文章編號107879
期刊Solid-State Electronics
172
DOIs
出版狀態Published - 2020 十月

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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