Automated surface profile measurement of diamond grid disk by phase-shifted shadow Moiré

研究成果: Conference contribution

摘要

Diamond grid disk dresser is frequently employed to remove the accumulated debris lest the polishing surface glazes. The surface warpage of diamond grid disk must be small enough to assure the flatness of polished wafers during chemical mechanical planarization process. In this study, phase-shifted shadow moiré method was employed to measure the surface profile of diamond grid disk. To eliminate erroneous bright or black spots caused by the diamond grids, a new approach is proposed by automatically selecting a proper threshold value from the differentiated image resulting from the addition of four phase-shifted images. According to the largest size of erroneous spot, the size of a structuring element is determined for morphology filtering. Thereafter the phase can be calculated and unwrapped correctly. Test of the method on a diamond grid disk is demonstrated and discussed.

原文English
主出版物標題International Conference on Experimental Mechanics 2013 and Twelfth Asian Conference on Experimental Mechanics
發行者SPIE
ISBN(列印)9781628412888
DOIs
出版狀態Published - 2014 一月 1
事件International Conference on Experimental Mechanics 2013, ICEM 2013 and the 12th Asian Conference on Experimental Mechanics, ACEM 2013 - Bangkok, Thailand
持續時間: 2013 十一月 252013 十一月 27

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
9234
ISSN(列印)0277-786X
ISSN(電子)1996-756X

Other

OtherInternational Conference on Experimental Mechanics 2013, ICEM 2013 and the 12th Asian Conference on Experimental Mechanics, ACEM 2013
國家/地區Thailand
城市Bangkok
期間13-11-2513-11-27

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 凝聚態物理學
  • 電腦科學應用
  • 應用數學
  • 電氣與電子工程

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