TY - GEN
T1 - Automated surface profile measurement of diamond grid disk by phase-shifted shadow Moiré
AU - Chen, Terry Yuan Fang
AU - Lin, Jie
PY - 2014
Y1 - 2014
N2 - Diamond grid disk dresser is frequently employed to remove the accumulated debris lest the polishing surface glazes. The surface warpage of diamond grid disk must be small enough to assure the flatness of polished wafers during chemical mechanical planarization process. In this study, phase-shifted shadow moiré method was employed to measure the surface profile of diamond grid disk. To eliminate erroneous bright or black spots caused by the diamond grids, a new approach is proposed by automatically selecting a proper threshold value from the differentiated image resulting from the addition of four phase-shifted images. According to the largest size of erroneous spot, the size of a structuring element is determined for morphology filtering. Thereafter the phase can be calculated and unwrapped correctly. Test of the method on a diamond grid disk is demonstrated and discussed.
AB - Diamond grid disk dresser is frequently employed to remove the accumulated debris lest the polishing surface glazes. The surface warpage of diamond grid disk must be small enough to assure the flatness of polished wafers during chemical mechanical planarization process. In this study, phase-shifted shadow moiré method was employed to measure the surface profile of diamond grid disk. To eliminate erroneous bright or black spots caused by the diamond grids, a new approach is proposed by automatically selecting a proper threshold value from the differentiated image resulting from the addition of four phase-shifted images. According to the largest size of erroneous spot, the size of a structuring element is determined for morphology filtering. Thereafter the phase can be calculated and unwrapped correctly. Test of the method on a diamond grid disk is demonstrated and discussed.
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U2 - 10.1117/12.2055396
DO - 10.1117/12.2055396
M3 - Conference contribution
AN - SCOPUS:84902769079
SN - 9781628412888
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - International Conference on Experimental Mechanics 2013 and Twelfth Asian Conference on Experimental Mechanics
PB - SPIE
T2 - International Conference on Experimental Mechanics 2013, ICEM 2013 and the 12th Asian Conference on Experimental Mechanics, ACEM 2013
Y2 - 25 November 2013 through 27 November 2013
ER -