TY - GEN
T1 - Automatic optical inspection on mura defect of TFT-LCD
AU - Chen, S. L.
AU - Jhou, J. W.
PY - 2007
Y1 - 2007
N2 - Automatic optical inspection plays a key role in inspection of automations and equipments. It can replace manual inspect, reduce the production costs and achieve high speed and high precision with the inspection. Increasing the quality and efficiency of production materially. Mura defect automatic optical inspection system combines with electro-mechanical Systems, image acquisition systems and inspection software. In inspection software, it is to implement polynomial background surface estimation, use the standard which was defined by SEMI and apply auto-focus method to ensure the quality of image. This system has 100% accuracy and spent 45∼55 seconds in the experimental stage. There are two options can be selected, inline or off-line inspection.
AB - Automatic optical inspection plays a key role in inspection of automations and equipments. It can replace manual inspect, reduce the production costs and achieve high speed and high precision with the inspection. Increasing the quality and efficiency of production materially. Mura defect automatic optical inspection system combines with electro-mechanical Systems, image acquisition systems and inspection software. In inspection software, it is to implement polynomial background surface estimation, use the standard which was defined by SEMI and apply auto-focus method to ensure the quality of image. This system has 100% accuracy and spent 45∼55 seconds in the experimental stage. There are two options can be selected, inline or off-line inspection.
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U2 - 10.1007/978-1-84628-988-0_52
DO - 10.1007/978-1-84628-988-0_52
M3 - Conference contribution
AN - SCOPUS:84900665047
SN - 9781846289873
T3 - Proceedings of the 35th International MATADOR 2007 Conference
SP - 233
EP - 236
BT - Proceedings of the 35th International MATADOR 2007 Conference
PB - Springer Science and Business Media, LLC
T2 - 35th International MATADOR 2007 Conference
Y2 - 1 July 2007 through 1 July 2007
ER -