Automatic optical inspection on mura defect of TFT-LCD

S. L. Chen, J. W. Jhou

研究成果: Conference contribution

4 引文 斯高帕斯(Scopus)

摘要

Automatic optical inspection plays a key role in inspection of automations and equipments. It can replace manual inspect, reduce the production costs and achieve high speed and high precision with the inspection. Increasing the quality and efficiency of production materially. Mura defect automatic optical inspection system combines with electro-mechanical Systems, image acquisition systems and inspection software. In inspection software, it is to implement polynomial background surface estimation, use the standard which was defined by SEMI and apply auto-focus method to ensure the quality of image. This system has 100% accuracy and spent 45∼55 seconds in the experimental stage. There are two options can be selected, inline or off-line inspection.

原文English
主出版物標題Proceedings of the 35th International MATADOR 2007 Conference
發行者Springer Science and Business Media, LLC
頁面233-236
頁數4
ISBN(列印)9781846289873
DOIs
出版狀態Published - 2007 一月 1
事件35th International MATADOR 2007 Conference - Taipei, Taiwan
持續時間: 2007 七月 12007 七月 1

出版系列

名字Proceedings of the 35th International MATADOR 2007 Conference

Other

Other35th International MATADOR 2007 Conference
國家/地區Taiwan
城市Taipei
期間07-07-0107-07-01

All Science Journal Classification (ASJC) codes

  • 材料力學

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