Automatic polishing of super accuracy mirror mold with free-form surface by curvature analysis

M. J. Tsai, Jing-Jing Fang, J. F. Huang

研究成果: Conference contribution

3 引文 (Scopus)

摘要

This paper proposed a polishing path planning method of super accuracy mirror mold with free-form surface by curvature analysis. First, IGES files of free-form surfaces are read and the mold geometry is regenerated as B-spline surface by the Automatic Mold Polishing System (AMPS). By using the derivative properties of B-spline surface, normal vector and principal curvatures at any point of the surface are calculated. In addition, the effective contact width between polishing tool and mold surface based on the grain size and the principal radii of curvature is also determined. The minimum contact width in 3-D is mapped onto the (u, v) parameters of B-spline surface. Then a modified Peano fractal path with weaving function is calculated based on the effective contact width in the (u, v) coordinate. This Peano-weaving path was tested on an optical mold with free-form surface. The polishing result shows the method is very effective and achieves the level of mirror surface with roughness Ra 29nm.

原文English
主出版物標題Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture
頁面547-552
頁數6
版本PART 1
出版狀態Published - 2006 十二月 1
事件2005 International Conference on Advanced Manufacture, ICAM2005 - Taipei, R.O.C., Taiwan
持續時間: 2005 十一月 282005 十二月 2

出版系列

名字Materials Science Forum
號碼PART 1
505-507
ISSN(列印)0255-5476

Other

Other2005 International Conference on Advanced Manufacture, ICAM2005
國家Taiwan
城市Taipei, R.O.C.
期間05-11-2805-12-02

指紋

Polishing
polishing
Mirrors
curvature
mirrors
splines
weaving
Splines
trajectory planning
Motion planning
files
Fractals
fractals
roughness
grain size
Surface roughness
Derivatives
radii
Geometry
geometry

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

引用此文

Tsai, M. J., Fang, J-J., & Huang, J. F. (2006). Automatic polishing of super accuracy mirror mold with free-form surface by curvature analysis. 於 Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture (PART 1 編輯, 頁 547-552). (Materials Science Forum; 卷 505-507, 編號 PART 1).
Tsai, M. J. ; Fang, Jing-Jing ; Huang, J. F. / Automatic polishing of super accuracy mirror mold with free-form surface by curvature analysis. Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1. 編輯 2006. 頁 547-552 (Materials Science Forum; PART 1).
@inproceedings{419aed8a9e5947fc90f6ac0f970f4d9e,
title = "Automatic polishing of super accuracy mirror mold with free-form surface by curvature analysis",
abstract = "This paper proposed a polishing path planning method of super accuracy mirror mold with free-form surface by curvature analysis. First, IGES files of free-form surfaces are read and the mold geometry is regenerated as B-spline surface by the Automatic Mold Polishing System (AMPS). By using the derivative properties of B-spline surface, normal vector and principal curvatures at any point of the surface are calculated. In addition, the effective contact width between polishing tool and mold surface based on the grain size and the principal radii of curvature is also determined. The minimum contact width in 3-D is mapped onto the (u, v) parameters of B-spline surface. Then a modified Peano fractal path with weaving function is calculated based on the effective contact width in the (u, v) coordinate. This Peano-weaving path was tested on an optical mold with free-form surface. The polishing result shows the method is very effective and achieves the level of mirror surface with roughness Ra 29nm.",
author = "Tsai, {M. J.} and Jing-Jing Fang and Huang, {J. F.}",
year = "2006",
month = "12",
day = "1",
language = "English",
isbn = "0878499903",
series = "Materials Science Forum",
number = "PART 1",
pages = "547--552",
booktitle = "Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture",
edition = "PART 1",

}

Tsai, MJ, Fang, J-J & Huang, JF 2006, Automatic polishing of super accuracy mirror mold with free-form surface by curvature analysis. 於 Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1 edn, Materials Science Forum, 編號 PART 1, 卷 505-507, 頁 547-552, 2005 International Conference on Advanced Manufacture, ICAM2005, Taipei, R.O.C., Taiwan, 05-11-28.

Automatic polishing of super accuracy mirror mold with free-form surface by curvature analysis. / Tsai, M. J.; Fang, Jing-Jing; Huang, J. F.

Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1. 編輯 2006. p. 547-552 (Materials Science Forum; 卷 505-507, 編號 PART 1).

研究成果: Conference contribution

TY - GEN

T1 - Automatic polishing of super accuracy mirror mold with free-form surface by curvature analysis

AU - Tsai, M. J.

AU - Fang, Jing-Jing

AU - Huang, J. F.

PY - 2006/12/1

Y1 - 2006/12/1

N2 - This paper proposed a polishing path planning method of super accuracy mirror mold with free-form surface by curvature analysis. First, IGES files of free-form surfaces are read and the mold geometry is regenerated as B-spline surface by the Automatic Mold Polishing System (AMPS). By using the derivative properties of B-spline surface, normal vector and principal curvatures at any point of the surface are calculated. In addition, the effective contact width between polishing tool and mold surface based on the grain size and the principal radii of curvature is also determined. The minimum contact width in 3-D is mapped onto the (u, v) parameters of B-spline surface. Then a modified Peano fractal path with weaving function is calculated based on the effective contact width in the (u, v) coordinate. This Peano-weaving path was tested on an optical mold with free-form surface. The polishing result shows the method is very effective and achieves the level of mirror surface with roughness Ra 29nm.

AB - This paper proposed a polishing path planning method of super accuracy mirror mold with free-form surface by curvature analysis. First, IGES files of free-form surfaces are read and the mold geometry is regenerated as B-spline surface by the Automatic Mold Polishing System (AMPS). By using the derivative properties of B-spline surface, normal vector and principal curvatures at any point of the surface are calculated. In addition, the effective contact width between polishing tool and mold surface based on the grain size and the principal radii of curvature is also determined. The minimum contact width in 3-D is mapped onto the (u, v) parameters of B-spline surface. Then a modified Peano fractal path with weaving function is calculated based on the effective contact width in the (u, v) coordinate. This Peano-weaving path was tested on an optical mold with free-form surface. The polishing result shows the method is very effective and achieves the level of mirror surface with roughness Ra 29nm.

UR - http://www.scopus.com/inward/record.url?scp=35348913163&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=35348913163&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:35348913163

SN - 0878499903

SN - 9780878499908

T3 - Materials Science Forum

SP - 547

EP - 552

BT - Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture

ER -

Tsai MJ, Fang J-J, Huang JF. Automatic polishing of super accuracy mirror mold with free-form surface by curvature analysis. 於 Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture. PART 1 編輯 2006. p. 547-552. (Materials Science Forum; PART 1).