Automatic polishing of super accuracy mirror mold with free-form surface by curvature analysis

M. J. Tsai, J. J. Fang, J. F. Huang

研究成果: Conference contribution

3 引文 斯高帕斯(Scopus)

摘要

This paper proposed a polishing path planning method of super accuracy mirror mold with free-form surface by curvature analysis. First, IGES files of free-form surfaces are read and the mold geometry is regenerated as B-spline surface by the Automatic Mold Polishing System (AMPS). By using the derivative properties of B-spline surface, normal vector and principal curvatures at any point of the surface are calculated. In addition, the effective contact width between polishing tool and mold surface based on the grain size and the principal radii of curvature is also determined. The minimum contact width in 3-D is mapped onto the (u, v) parameters of B-spline surface. Then a modified Peano fractal path with weaving function is calculated based on the effective contact width in the (u, v) coordinate. This Peano-weaving path was tested on an optical mold with free-form surface. The polishing result shows the method is very effective and achieves the level of mirror surface with roughness Ra 29nm.

原文English
主出版物標題Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture
發行者Trans Tech Publications Ltd
頁面547-552
頁數6
版本PART 1
ISBN(列印)0878499903, 9780878499908
DOIs
出版狀態Published - 2006
事件2005 International Conference on Advanced Manufacture, ICAM2005 - Taipei, R.O.C., Taiwan
持續時間: 2005 十一月 282005 十二月 2

出版系列

名字Materials Science Forum
號碼PART 1
505-507
ISSN(列印)0255-5476
ISSN(電子)1662-9752

Other

Other2005 International Conference on Advanced Manufacture, ICAM2005
國家/地區Taiwan
城市Taipei, R.O.C.
期間05-11-2805-12-02

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 凝聚態物理學
  • 材料力學
  • 機械工業

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