TY - GEN
T1 - Automatic virtual metrology system design and implementation
AU - Huang, Yi Ting
AU - Huang, Hsien Cheng
AU - Cheng, Fan Tien
AU - Liao, Tai Siang
AU - Chang, Fu Chien
PY - 2008/11/3
Y1 - 2008/11/3
N2 - An automatic virtual metrology (AVM) system that consists of a model-creation server and many AVM servers is proposed. The model-creation server will generate the first set of data quality evaluation models and virtual metrology (VM) conjecture models of a certain equipment type. Under fab-wide VM deployment, the model-creation server can also fan out the first set of models generated to all the AVM servers of the same equipment type. Also, each individual fan-out-accepter's AVM server can perform an automatic model refreshing process to promptly refresh its own data quality evaluation models and VM conjecture models. As such, the VM accuracy can be maintained and the AVM server is then ready to serve. This paper gives an overview to the AVM system and elaborates the automatic data quality evaluation schemes and the automatic model refreshing schemes.
AB - An automatic virtual metrology (AVM) system that consists of a model-creation server and many AVM servers is proposed. The model-creation server will generate the first set of data quality evaluation models and virtual metrology (VM) conjecture models of a certain equipment type. Under fab-wide VM deployment, the model-creation server can also fan out the first set of models generated to all the AVM servers of the same equipment type. Also, each individual fan-out-accepter's AVM server can perform an automatic model refreshing process to promptly refresh its own data quality evaluation models and VM conjecture models. As such, the VM accuracy can be maintained and the AVM server is then ready to serve. This paper gives an overview to the AVM system and elaborates the automatic data quality evaluation schemes and the automatic model refreshing schemes.
UR - http://www.scopus.com/inward/record.url?scp=54949091590&partnerID=8YFLogxK
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U2 - 10.1109/COASE.2008.4626524
DO - 10.1109/COASE.2008.4626524
M3 - Conference contribution
AN - SCOPUS:54949091590
SN - 9781424420230
T3 - 4th IEEE Conference on Automation Science and Engineering, CASE 2008
SP - 223
EP - 229
BT - 4th IEEE Conference on Automation Science and Engineering, CASE 2008
T2 - 4th IEEE Conference on Automation Science and Engineering, CASE 2008
Y2 - 23 August 2008 through 26 August 2008
ER -