Automatic virtual metrology system design and implementation

Yi Ting Huang, Hsien Cheng Huang, Fan Tien Cheng, Tai Siang Liao, Fu Chien Chang

研究成果: Conference contribution

10 引文 斯高帕斯(Scopus)

摘要

An automatic virtual metrology (AVM) system that consists of a model-creation server and many AVM servers is proposed. The model-creation server will generate the first set of data quality evaluation models and virtual metrology (VM) conjecture models of a certain equipment type. Under fab-wide VM deployment, the model-creation server can also fan out the first set of models generated to all the AVM servers of the same equipment type. Also, each individual fan-out-accepter's AVM server can perform an automatic model refreshing process to promptly refresh its own data quality evaluation models and VM conjecture models. As such, the VM accuracy can be maintained and the AVM server is then ready to serve. This paper gives an overview to the AVM system and elaborates the automatic data quality evaluation schemes and the automatic model refreshing schemes.

原文English
主出版物標題4th IEEE Conference on Automation Science and Engineering, CASE 2008
頁面223-229
頁數7
DOIs
出版狀態Published - 2008 十一月 3
事件4th IEEE Conference on Automation Science and Engineering, CASE 2008 - Washington, DC, United States
持續時間: 2008 八月 232008 八月 26

出版系列

名字4th IEEE Conference on Automation Science and Engineering, CASE 2008

Other

Other4th IEEE Conference on Automation Science and Engineering, CASE 2008
國家United States
城市Washington, DC
期間08-08-2308-08-26

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • 引用此

    Huang, Y. T., Huang, H. C., Cheng, F. T., Liao, T. S., & Chang, F. C. (2008). Automatic virtual metrology system design and implementation. 於 4th IEEE Conference on Automation Science and Engineering, CASE 2008 (頁 223-229). [4626524] (4th IEEE Conference on Automation Science and Engineering, CASE 2008). https://doi.org/10.1109/COASE.2008.4626524