Batch assembly micro-ball lens array for Si-based optical coupling platform in free space

S. C. Shen, C. T. Pan, H. P. Chou, Y. H. Chao, K. L. Lin, Jauh Jung Yang Jauh Jung

研究成果: Article同行評審

1 引文 斯高帕斯(Scopus)

摘要

The paper presents novel concepts of batch fabrication of micro-ball lens array technology integrated on the silicon-based wafer by low temperature wafer bonding by which can improve appropriate distance of optical fiber coupling. The silicon based coupling platform consists of the self-parking framework, micro-ball lens array, and precision platform for optical fiber coupling purpose. The structure of optical platform is able to improve distance of between fiber and micro-ball lens and increase coupling efficiency. The micro-ball lens array is batch fabricated by polymeric material and melting photoresist through low temperature wafer bonding. Then batch assembly onto each other flat-topped mesa that adjoins to the v-groove. The comer compensation offers a method to fabricate self-parking framework and flat-topped mesa in the intersection of two v-grooves. This fabrication process not only provides accurate coupling distance between fibers and micro-ball lens hut also reduces micro-assembly cost.

原文English
頁(從 - 到)326-333
頁數8
期刊Proceedings of SPIE-The International Society for Optical Engineering
4416
DOIs
出版狀態Published - 2001 一月 1

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 凝聚態物理學
  • 電腦科學應用
  • 應用數學
  • 電氣與電子工程

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