The paper presents novel concepts of batch fabrication of micro-ball lens array technology integrated on the silicon-based wafer by low temperature wafer bonding by which can improve appropriate distance of optical fiber coupling. The silicon based coupling platform consists of the self-parking framework, micro-ball lens array, and precision platform for optical fiber coupling purpose. The structure of optical platform is able to improve distance of between fiber and micro-ball lens and increase coupling efficiency. The micro-ball lens array is batch fabricated by polymeric material and melting photoresist through low temperature wafer bonding. Then batch assembly onto each other flat-topped mesa that adjoins to the v-groove. The comer compensation offers a method to fabricate self-parking framework and flat-topped mesa in the intersection of two v-grooves. This fabrication process not only provides accurate coupling distance between fibers and micro-ball lens hut also reduces micro-assembly cost.
|頁（從 - 到）||326-333|
|期刊||Proceedings of SPIE-The International Society for Optical Engineering|
|出版狀態||Published - 2001 一月 1|
All Science Journal Classification (ASJC) codes